JPS61156230U - - Google Patents

Info

Publication number
JPS61156230U
JPS61156230U JP4009685U JP4009685U JPS61156230U JP S61156230 U JPS61156230 U JP S61156230U JP 4009685 U JP4009685 U JP 4009685U JP 4009685 U JP4009685 U JP 4009685U JP S61156230 U JPS61156230 U JP S61156230U
Authority
JP
Japan
Prior art keywords
electron beam
blanking
electron
control section
condenser lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4009685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4009685U priority Critical patent/JPS61156230U/ja
Publication of JPS61156230U publication Critical patent/JPS61156230U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4009685U 1985-03-19 1985-03-19 Pending JPS61156230U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4009685U JPS61156230U (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4009685U JPS61156230U (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Publications (1)

Publication Number Publication Date
JPS61156230U true JPS61156230U (enrdf_load_stackoverflow) 1986-09-27

Family

ID=30548667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4009685U Pending JPS61156230U (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Country Status (1)

Country Link
JP (1) JPS61156230U (enrdf_load_stackoverflow)

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