JPS61156172U - - Google Patents

Info

Publication number
JPS61156172U
JPS61156172U JP3878285U JP3878285U JPS61156172U JP S61156172 U JPS61156172 U JP S61156172U JP 3878285 U JP3878285 U JP 3878285U JP 3878285 U JP3878285 U JP 3878285U JP S61156172 U JPS61156172 U JP S61156172U
Authority
JP
Japan
Prior art keywords
vertical mechanism
electron microscope
scanning electron
objective lens
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3878285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3878285U priority Critical patent/JPS61156172U/ja
Publication of JPS61156172U publication Critical patent/JPS61156172U/ja
Pending legal-status Critical Current

Links

JP3878285U 1985-03-20 1985-03-20 Pending JPS61156172U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3878285U JPS61156172U (enrdf_load_stackoverflow) 1985-03-20 1985-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3878285U JPS61156172U (enrdf_load_stackoverflow) 1985-03-20 1985-03-20

Publications (1)

Publication Number Publication Date
JPS61156172U true JPS61156172U (enrdf_load_stackoverflow) 1986-09-27

Family

ID=30546106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3878285U Pending JPS61156172U (enrdf_load_stackoverflow) 1985-03-20 1985-03-20

Country Status (1)

Country Link
JP (1) JPS61156172U (enrdf_load_stackoverflow)

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