JPS61155830A - 圧力変換器 - Google Patents

圧力変換器

Info

Publication number
JPS61155830A
JPS61155830A JP27613784A JP27613784A JPS61155830A JP S61155830 A JPS61155830 A JP S61155830A JP 27613784 A JP27613784 A JP 27613784A JP 27613784 A JP27613784 A JP 27613784A JP S61155830 A JPS61155830 A JP S61155830A
Authority
JP
Japan
Prior art keywords
pressure
envelope
sensitive element
semiconductor pressure
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27613784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443225B2 (enrdf_load_stackoverflow
Inventor
Akira Ishii
明 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP27613784A priority Critical patent/JPS61155830A/ja
Publication of JPS61155830A publication Critical patent/JPS61155830A/ja
Publication of JPH0443225B2 publication Critical patent/JPH0443225B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP27613784A 1984-12-28 1984-12-28 圧力変換器 Granted JPS61155830A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27613784A JPS61155830A (ja) 1984-12-28 1984-12-28 圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27613784A JPS61155830A (ja) 1984-12-28 1984-12-28 圧力変換器

Publications (2)

Publication Number Publication Date
JPS61155830A true JPS61155830A (ja) 1986-07-15
JPH0443225B2 JPH0443225B2 (enrdf_load_stackoverflow) 1992-07-15

Family

ID=17565291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27613784A Granted JPS61155830A (ja) 1984-12-28 1984-12-28 圧力変換器

Country Status (1)

Country Link
JP (1) JPS61155830A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5131400A (en) * 1989-06-13 1992-07-21 Colin Electronics Co., Ltd. Pulse wave detecting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5131400A (en) * 1989-06-13 1992-07-21 Colin Electronics Co., Ltd. Pulse wave detecting apparatus

Also Published As

Publication number Publication date
JPH0443225B2 (enrdf_load_stackoverflow) 1992-07-15

Similar Documents

Publication Publication Date Title
US4500864A (en) Pressure sensor
US4689999A (en) Temperature compensated pressure transducer
JPS62191730A (ja) 圧力センサ
US4166269A (en) Temperature compensated piezoresistive transducer
US3461416A (en) Pressure transducer utilizing semiconductor beam
US3568124A (en) Piezoresistive force- and pressure-measuring element
US4488436A (en) Pressure sensor
US3482197A (en) Pressure sensitive device incorporating semiconductor transducer
JPS62214327A (ja) 厚膜センサ−
CN115568839A (zh) 一种测压导管传感器载体及测压结构及测压导管
JPH095191A (ja) 静電容量式圧力センサ
JPS61155830A (ja) 圧力変換器
WO1996022515A1 (en) Apparatus for detection of a diaphragm rupture in a pressure sensor
JPH0814517B2 (ja) 半導体圧力センサ
US4157032A (en) Electrically isolated strain gage assembly
US5614673A (en) Acceleration sensing device
JPS59145940A (ja) 差圧・圧力伝送器
JPH02196938A (ja) 圧力センサ
HU210503B (en) Method for mersuring pressure with pressure diaphragm transdilcer
GB2128806A (en) Pressure transducer
JP3307274B2 (ja) 半導体圧力センサ
US3830100A (en) Strain gauge transducer transient voltage protection
JPH02256278A (ja) 半導体圧力センサ
JP2002372474A (ja) 半導体センサ装置
JP4244372B2 (ja) 半導体センサ装置