JPS6115572Y2 - - Google Patents

Info

Publication number
JPS6115572Y2
JPS6115572Y2 JP5378884U JP5378884U JPS6115572Y2 JP S6115572 Y2 JPS6115572 Y2 JP S6115572Y2 JP 5378884 U JP5378884 U JP 5378884U JP 5378884 U JP5378884 U JP 5378884U JP S6115572 Y2 JPS6115572 Y2 JP S6115572Y2
Authority
JP
Japan
Prior art keywords
deflection
electron beam
electron
magnification
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5378884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6033750U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5378884U priority Critical patent/JPS6033750U/ja
Publication of JPS6033750U publication Critical patent/JPS6033750U/ja
Application granted granted Critical
Publication of JPS6115572Y2 publication Critical patent/JPS6115572Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5378884U 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置 Granted JPS6033750U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5378884U JPS6033750U (ja) 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5378884U JPS6033750U (ja) 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置

Publications (2)

Publication Number Publication Date
JPS6033750U JPS6033750U (ja) 1985-03-07
JPS6115572Y2 true JPS6115572Y2 (enrdf_load_stackoverflow) 1986-05-14

Family

ID=30184131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5378884U Granted JPS6033750U (ja) 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置

Country Status (1)

Country Link
JP (1) JPS6033750U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3762982B2 (ja) * 2001-12-26 2006-04-05 独立行政法人物質・材料研究機構 透過電子顕微鏡の軸調整方法およびその装置

Also Published As

Publication number Publication date
JPS6033750U (ja) 1985-03-07

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