JPS6115436Y2 - - Google Patents

Info

Publication number
JPS6115436Y2
JPS6115436Y2 JP5385584U JP5385584U JPS6115436Y2 JP S6115436 Y2 JPS6115436 Y2 JP S6115436Y2 JP 5385584 U JP5385584 U JP 5385584U JP 5385584 U JP5385584 U JP 5385584U JP S6115436 Y2 JPS6115436 Y2 JP S6115436Y2
Authority
JP
Japan
Prior art keywords
cleaning liquid
nozzle
polished
abrasive material
abrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5385584U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59191096U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5385584U priority Critical patent/JPS59191096U/ja
Publication of JPS59191096U publication Critical patent/JPS59191096U/ja
Application granted granted Critical
Publication of JPS6115436Y2 publication Critical patent/JPS6115436Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP5385584U 1984-04-11 1984-04-11 研掃装置のノズル Granted JPS59191096U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5385584U JPS59191096U (ja) 1984-04-11 1984-04-11 研掃装置のノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5385584U JPS59191096U (ja) 1984-04-11 1984-04-11 研掃装置のノズル

Publications (2)

Publication Number Publication Date
JPS59191096U JPS59191096U (ja) 1984-12-18
JPS6115436Y2 true JPS6115436Y2 (en, 2012) 1986-05-13

Family

ID=30184201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5385584U Granted JPS59191096U (ja) 1984-04-11 1984-04-11 研掃装置のノズル

Country Status (1)

Country Link
JP (1) JPS59191096U (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5311938B2 (ja) * 2008-09-08 2013-10-09 Nsマテリアルズ株式会社 基板処理装置及び基板処理方法
JP5595825B2 (ja) * 2010-08-05 2014-09-24 川崎重工業株式会社 舶用ボイラの伝熱管の洗浄方法及び装置
WO2021171626A1 (ja) * 2020-02-28 2021-09-02 中国電力株式会社 脱硝触媒研磨方法及び脱硝触媒研磨装置

Also Published As

Publication number Publication date
JPS59191096U (ja) 1984-12-18

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