JPS61150118A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To decrease man-hour and manufacture cost by using a plating background film in forming a magnetic core of an induction type thin film magnetic head as a plating background film in forming a coil lead. CONSTITUTION:After a photo resist 8 is exfoliated and removed from the state shown in figure at first, a photo resist is applied to the entire face newly. Then a mask not exposing only a position corresponding to a coil lead 5 is used and a photo resist film 9 exposed for the coil lead 5 only is formed by the processes of exposure, development and film hardening. Then gold is subject to electrolytic plating to form the coil lead 5, the photo resist film 9 is exfoliated and a plating background magnetic film 7 made of 'Permalloy(R)' thin film other than the part coated to the magnetic core 4 and the lead 5 is removed by etching. Thus, the induction type thin film magnetic head is formed.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a thin film magnetic head for recording or reproducing information on a magnetic tape used, for example, in an audio device, a video tape recorder, a combination machine, etc.] , particularly regarding the material and structure of the coil lead wire.

[Technical background of the invention]

In recent years, with the increase in the density of magnetic recording performed using magnetic tape, thin film magnetic disks manufactured using thin film technology have attracted attention.

As shown in a perspective view in FIG. 2, this thin HFi is usually formed by patterning a snoural-shaped coil 3 on a magnetic substrate 1 through a magnetic ear 2, and a magnetic core that intersects a part of this coil 3. 4 are laminated with an insulating film interposed therebetween, and a coil lead wire 5 is provided at one end of the innermost end of the coil 3 to connect to an external circuit. In order to increase the efficiency of this 3Fi magnetic head, it is necessary to increase the number of turns, so the coil is formed in a square shape. Therefore, the magnetic core 4 that intersects with the coil 3 must be insulated from the coil 3, and the coil lead-out wire 5 must also be insulated from the coil 3 except for the connection portion with the coil 3. In addition, in order to increase the efficiency of the spatula P, the magnetic core 4 needs to be thick to 5 to 10 μmS. The magnetic core 4 is formed by an easy-to-use selection method, and good characteristics are obtained by using a material such as Nomalloy.

Conventionally, the process shown in FIG. 3 has been used to manufacture the thin film magnetic head constructed as described above.

That is, a magnetic gap 2 as an insulating film is formed on the entire surface of the magnetic substrate l except for the part where the inner end of the magnetic core 4 comes into contact, and a strip (A) is formed on the magnetic gap 2 by normal lithography technology. A coil 3 made of a non-magnetic material is formed in a circular shape, and an insulating film 6 is further formed thereon except for one innermost end of the coil 3, as shown in FIG. As shown in Fig. 3), a permalloy thin film of about 0.3 .mu.m thick is laminated on the entire surface of the above structure by means of vapor deposition, sputtering, etc. to form a plated underlayer magnetic film 7. A photoresist 8 is applied over the entire surface of the plating base magnetic film 7, and steps such as exposure, development, and hardening are performed using an i-screen that exposes the area other than the part where the magnetic core 4 is to be formed using normal photolithography technology. Then, a resist layer is formed to expose only the portion where the magnetic core 4 will be formed, and permalloy is electrolytically plated thereon to form the magnetic core 4 as shown in FIG.

Next, as shown in (d) K, the photoresist 8 and the plating base magnetic film 7 other than the core 4 portion are removed by means such as etching, so that only one end of the innermost side of the coil 3 is exposed, and the other portions are Covered with insulation H6. On top of this, a coil lead wire 5 connected to one end of the innermost side of the coil 3 and drawn out to the outside is wired with Au, Ou as shown in (e) K.
, IJ, etc., were formed by means such as vapor deposition, scrubbing, plating, and etching.

[Problems with background technology]

According to the structure of the conventional thin film magnetic head as described above, after plating the magnetic core 4, it is necessary to remove the plating underlayer magnetic film 7, resulting in an interlayer that requires a large number of manufacturing steps.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned points, and it is an object of the present invention to reduce the number of manufacturing steps without deteriorating performance. .

[Summary of the Invention] The present invention provides a coil lead wire that is connected to one end of a coil formed on a magnetic substrate of an inductive thin magnetic head through a magnetic gap with a permalloy thin film as a base. A conductive material based on the above-mentioned No. 9-Malloy thin film! ? It is designed to be formed by

According to the above-mentioned configuration, there is no need to remove the plating underlayer magnetic film below the coil lead wire, and it is possible to reduce the number of manufacturing steps and lower the price.

[Embodiments of the invention]

An embodiment of the thin film magnetic head according to the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view showing the manufacturing process of an embodiment of the present invention. The same or equivalent parts as in the conventional example shown in Fig. 3 are given the same reference numerals, and the steps up to the steps shown in Fig. 1 (41)K are shown in Fig. 3-).
, (b), and (C), so their explanation will be omitted. After the photoresist 8 is peeled off from the state shown in FIG. 4(a)K, a new photoresist is applied to the entire surface.

'Next, the photoresist film 9 is exposed using a mask that does not expose only the position corresponding to the 50th position tK of the coil lead-out line, and through processes such as development and hardening, a photoresist film 9 is formed that exposes only the portion of the coil lead-out line 5. .

Then, gold is electrolytically plated to form a coil lead wire 5 as shown in the same figure. Next, a photoresist film 9 is formed.
After removing the film, the base magnetic film 7 formed of the non-malloy thin film other than the part covered with the magnetic core 4 and the coil lead wire 5 is removed by etching or other means as shown in FIG. do. An inductive thin film magnetic head is formed by the above steps.

According to the configuration of this embodiment described above, the magnetic JII underlayer used when forming the magnetic core 4 by electrolytic plating K.
7 is used as the plating base when forming the coil lead wire, so the plating base magnetic 1x7 is used after forming the magnetic core 4.
It is no longer necessary to remove , which reduces manufacturing man-hours and lowers manufacturing costs.

In addition, in this practical explanation, an example in which the coil lead wire is made of gold has been explained, but this coil lead wire may also be made of /MALLOY, and in this case, the magnetic core 4 and the coil lead wire are made of gold. 5 and 5 at the same time at a certain interval, the number of man-hours is further reduced.

〔Effect of the invention〕

According to the invention as described above! Since the plating base film used for forming the spatula core of IIa1 thinning M mother air head P is used as the plating base film for forming the coil lead wire, it is possible to reduce the number of man-hours and the manufacturing cost.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing the manufacturing process of an embodiment of the thin film magnetic head according to the present invention, FIG. 2 is a perspective view showing the structure of the thin film magnetic spatula P, and FIG. 3 is the manufacturing process of a conventional thin film magnetic head. FIG. 1...Magnetic substrate 2...Magnetic gap 3--Coil 4...Magnetic core 5--Coil lead wire 6...
・Insulating film 7...Plating base magnetic film Agent Patent attorney
Noriyuki Kensuke (and 1 other person) 1st ¥lA Figure 2

Claims (1)

[Claims] 1. A magnetic substrate, a coil formed spirally on the magnetic substrate with a permalloy thin film as a base via a magnetic gap, and a magnetic core intersecting this coil with an insulating film interposed therebetween; An inductive thin film magnetic head comprising a coil lead wire connected to one end of the coil, wherein the coil lead wire is formed by conductive plating with the permalloy thin film as a base. magnetic head. 2. The thin film magnetic head according to claim 1, wherein the conductor is gold. 3. The thin film magnetic head according to claim 1, wherein the conductor is permalloy.