JPS61149330U - - Google Patents

Info

Publication number
JPS61149330U
JPS61149330U JP3170385U JP3170385U JPS61149330U JP S61149330 U JPS61149330 U JP S61149330U JP 3170385 U JP3170385 U JP 3170385U JP 3170385 U JP3170385 U JP 3170385U JP S61149330 U JPS61149330 U JP S61149330U
Authority
JP
Japan
Prior art keywords
liquid tank
rotating plate
etching solution
wafer
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3170385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3170385U priority Critical patent/JPS61149330U/ja
Publication of JPS61149330U publication Critical patent/JPS61149330U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP3170385U 1985-03-06 1985-03-06 Pending JPS61149330U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3170385U JPS61149330U (ko) 1985-03-06 1985-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3170385U JPS61149330U (ko) 1985-03-06 1985-03-06

Publications (1)

Publication Number Publication Date
JPS61149330U true JPS61149330U (ko) 1986-09-16

Family

ID=30532545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3170385U Pending JPS61149330U (ko) 1985-03-06 1985-03-06

Country Status (1)

Country Link
JP (1) JPS61149330U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0280339A (ja) * 1988-09-13 1990-03-20 Furukawa Electric Co Ltd:The ガラス母材の表面処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0280339A (ja) * 1988-09-13 1990-03-20 Furukawa Electric Co Ltd:The ガラス母材の表面処理方法

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