JPS62110854U - - Google Patents
Info
- Publication number
- JPS62110854U JPS62110854U JP1985204719U JP20471985U JPS62110854U JP S62110854 U JPS62110854 U JP S62110854U JP 1985204719 U JP1985204719 U JP 1985204719U JP 20471985 U JP20471985 U JP 20471985U JP S62110854 U JPS62110854 U JP S62110854U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- semiconductor substrate
- central axis
- polishing apparatus
- polishing surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985204719U JPS62110854U (ko) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985204719U JPS62110854U (ko) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62110854U true JPS62110854U (ko) | 1987-07-15 |
Family
ID=31170716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985204719U Pending JPS62110854U (ko) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62110854U (ko) |
-
1985
- 1985-12-27 JP JP1985204719U patent/JPS62110854U/ja active Pending
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