JPS61148847A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS61148847A
JPS61148847A JP59270443A JP27044384A JPS61148847A JP S61148847 A JPS61148847 A JP S61148847A JP 59270443 A JP59270443 A JP 59270443A JP 27044384 A JP27044384 A JP 27044384A JP S61148847 A JPS61148847 A JP S61148847A
Authority
JP
Japan
Prior art keywords
wiring
semiconductor chip
polyimide
multilayer
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59270443A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571139B2 (cg-RX-API-DMAC10.html
Inventor
Teruyuki Nabeta
鍋田　照行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59270443A priority Critical patent/JPS61148847A/ja
Publication of JPS61148847A publication Critical patent/JPS61148847A/ja
Publication of JPH0571139B2 publication Critical patent/JPH0571139B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W70/611—
    • H10W70/685—
    • H10W70/60—
    • H10W72/381—
    • H10W72/536—
    • H10W72/5363—
    • H10W72/874—
    • H10W72/884—
    • H10W90/734—
    • H10W90/754—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP59270443A 1984-12-21 1984-12-21 半導体装置 Granted JPS61148847A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59270443A JPS61148847A (ja) 1984-12-21 1984-12-21 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59270443A JPS61148847A (ja) 1984-12-21 1984-12-21 半導体装置

Publications (2)

Publication Number Publication Date
JPS61148847A true JPS61148847A (ja) 1986-07-07
JPH0571139B2 JPH0571139B2 (cg-RX-API-DMAC10.html) 1993-10-06

Family

ID=17486352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59270443A Granted JPS61148847A (ja) 1984-12-21 1984-12-21 半導体装置

Country Status (1)

Country Link
JP (1) JPS61148847A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6492723B2 (en) * 1998-11-16 2002-12-10 Nec Corporation Multichip module
EP1158844A3 (en) * 2000-05-22 2003-10-15 Murata Manufacturing Co., Ltd. Laminated ceramic electronic component, production method therefor, and electronic device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856451U (ja) * 1981-10-07 1983-04-16 三菱電機株式会社 半導体装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856451U (ja) * 1981-10-07 1983-04-16 三菱電機株式会社 半導体装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6492723B2 (en) * 1998-11-16 2002-12-10 Nec Corporation Multichip module
EP1158844A3 (en) * 2000-05-22 2003-10-15 Murata Manufacturing Co., Ltd. Laminated ceramic electronic component, production method therefor, and electronic device
US6974916B2 (en) 2000-05-22 2005-12-13 Murata Manufacturing Co., Ltd. Laminated ceramic electronic component having via-hole conductors with different sectional sizes

Also Published As

Publication number Publication date
JPH0571139B2 (cg-RX-API-DMAC10.html) 1993-10-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees