JPS61148838U - - Google Patents

Info

Publication number
JPS61148838U
JPS61148838U JP3076485U JP3076485U JPS61148838U JP S61148838 U JPS61148838 U JP S61148838U JP 3076485 U JP3076485 U JP 3076485U JP 3076485 U JP3076485 U JP 3076485U JP S61148838 U JPS61148838 U JP S61148838U
Authority
JP
Japan
Prior art keywords
sample
cassette
recesses
pedestal
convex portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3076485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322186Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985030764U priority Critical patent/JPH0322186Y2/ja
Publication of JPS61148838U publication Critical patent/JPS61148838U/ja
Application granted granted Critical
Publication of JPH0322186Y2 publication Critical patent/JPH0322186Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1985030764U 1985-03-06 1985-03-06 Expired JPH0322186Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985030764U JPH0322186Y2 (https=) 1985-03-06 1985-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985030764U JPH0322186Y2 (https=) 1985-03-06 1985-03-06

Publications (2)

Publication Number Publication Date
JPS61148838U true JPS61148838U (https=) 1986-09-13
JPH0322186Y2 JPH0322186Y2 (https=) 1991-05-15

Family

ID=30530751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985030764U Expired JPH0322186Y2 (https=) 1985-03-06 1985-03-06

Country Status (1)

Country Link
JP (1) JPH0322186Y2 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180634U (ja) * 1982-05-24 1983-12-02 大日本スクリ−ン製造株式会社 ウエハカセツトの位置決め検知装置
JPS5982242A (ja) * 1982-11-01 1984-05-12 Shinkawa Ltd マガジン交換装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180634U (ja) * 1982-05-24 1983-12-02 大日本スクリ−ン製造株式会社 ウエハカセツトの位置決め検知装置
JPS5982242A (ja) * 1982-11-01 1984-05-12 Shinkawa Ltd マガジン交換装置

Also Published As

Publication number Publication date
JPH0322186Y2 (https=) 1991-05-15

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