JPS61147261U - - Google Patents

Info

Publication number
JPS61147261U
JPS61147261U JP3164785U JP3164785U JPS61147261U JP S61147261 U JPS61147261 U JP S61147261U JP 3164785 U JP3164785 U JP 3164785U JP 3164785 U JP3164785 U JP 3164785U JP S61147261 U JPS61147261 U JP S61147261U
Authority
JP
Japan
Prior art keywords
vapor
vapor deposition
shielding member
deposition apparatus
ionizes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3164785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3164785U priority Critical patent/JPS61147261U/ja
Publication of JPS61147261U publication Critical patent/JPS61147261U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3164785U 1985-03-04 1985-03-04 Pending JPS61147261U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3164785U JPS61147261U (enExample) 1985-03-04 1985-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3164785U JPS61147261U (enExample) 1985-03-04 1985-03-04

Publications (1)

Publication Number Publication Date
JPS61147261U true JPS61147261U (enExample) 1986-09-11

Family

ID=30532435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3164785U Pending JPS61147261U (enExample) 1985-03-04 1985-03-04

Country Status (1)

Country Link
JP (1) JPS61147261U (enExample)

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