JPS61146945U - - Google Patents
Info
- Publication number
- JPS61146945U JPS61146945U JP2779086U JP2779086U JPS61146945U JP S61146945 U JPS61146945 U JP S61146945U JP 2779086 U JP2779086 U JP 2779086U JP 2779086 U JP2779086 U JP 2779086U JP S61146945 U JPS61146945 U JP S61146945U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- hydrogen
- furnace
- furnace core
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000002485 combustion reaction Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000007789 gas Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2779086U JPS61146945U (fr) | 1986-02-27 | 1986-02-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2779086U JPS61146945U (fr) | 1986-02-27 | 1986-02-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61146945U true JPS61146945U (fr) | 1986-09-10 |
Family
ID=30525067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2779086U Pending JPS61146945U (fr) | 1986-02-27 | 1986-02-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61146945U (fr) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53123667A (en) * | 1977-04-04 | 1978-10-28 | Mitsubishi Electric Corp | Generator for semiconuctor oxidized film |
-
1986
- 1986-02-27 JP JP2779086U patent/JPS61146945U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53123667A (en) * | 1977-04-04 | 1978-10-28 | Mitsubishi Electric Corp | Generator for semiconuctor oxidized film |
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