JPS6114653B2 - - Google Patents

Info

Publication number
JPS6114653B2
JPS6114653B2 JP16315178A JP16315178A JPS6114653B2 JP S6114653 B2 JPS6114653 B2 JP S6114653B2 JP 16315178 A JP16315178 A JP 16315178A JP 16315178 A JP16315178 A JP 16315178A JP S6114653 B2 JPS6114653 B2 JP S6114653B2
Authority
JP
Japan
Prior art keywords
pattern
electron
mask
secondary electron
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16315178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5587432A (en
Inventor
Yasuo Furukawa
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16315178A priority Critical patent/JPS5587432A/ja
Publication of JPS5587432A publication Critical patent/JPS5587432A/ja
Publication of JPS6114653B2 publication Critical patent/JPS6114653B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
JP16315178A 1978-12-26 1978-12-26 Electron beam exposure method Granted JPS5587432A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16315178A JPS5587432A (en) 1978-12-26 1978-12-26 Electron beam exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16315178A JPS5587432A (en) 1978-12-26 1978-12-26 Electron beam exposure method

Publications (2)

Publication Number Publication Date
JPS5587432A JPS5587432A (en) 1980-07-02
JPS6114653B2 true JPS6114653B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-19

Family

ID=15768184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16315178A Granted JPS5587432A (en) 1978-12-26 1978-12-26 Electron beam exposure method

Country Status (1)

Country Link
JP (1) JPS5587432A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5712668A (en) * 1980-06-27 1982-01-22 Nec Corp Printer
JPS5712679A (en) * 1980-06-27 1982-01-22 Nec Corp Printer
JP4945763B2 (ja) * 2005-05-17 2012-06-06 国立大学法人京都大学 電子ビーム露光装置

Also Published As

Publication number Publication date
JPS5587432A (en) 1980-07-02

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