JPS61144646U - - Google Patents
Info
- Publication number
- JPS61144646U JPS61144646U JP2851785U JP2851785U JPS61144646U JP S61144646 U JPS61144646 U JP S61144646U JP 2851785 U JP2851785 U JP 2851785U JP 2851785 U JP2851785 U JP 2851785U JP S61144646 U JPS61144646 U JP S61144646U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- wafer
- handle
- wafer carrier
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 4
- 230000000452 restraining effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2851785U JPS61144646U (enExample) | 1985-02-28 | 1985-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2851785U JPS61144646U (enExample) | 1985-02-28 | 1985-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61144646U true JPS61144646U (enExample) | 1986-09-06 |
Family
ID=30526462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2851785U Pending JPS61144646U (enExample) | 1985-02-28 | 1985-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61144646U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100350448B1 (ko) * | 1999-08-25 | 2002-08-28 | 삼성전자 주식회사 | 실리카 소결용 웨이퍼 카세트 |
-
1985
- 1985-02-28 JP JP2851785U patent/JPS61144646U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100350448B1 (ko) * | 1999-08-25 | 2002-08-28 | 삼성전자 주식회사 | 실리카 소결용 웨이퍼 카세트 |