JPS61144646U - - Google Patents

Info

Publication number
JPS61144646U
JPS61144646U JP1985028517U JP2851785U JPS61144646U JP S61144646 U JPS61144646 U JP S61144646U JP 1985028517 U JP1985028517 U JP 1985028517U JP 2851785 U JP2851785 U JP 2851785U JP S61144646 U JPS61144646 U JP S61144646U
Authority
JP
Japan
Prior art keywords
groove
wafer
handle
wafer carrier
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985028517U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985028517U priority Critical patent/JPS61144646U/ja
Publication of JPS61144646U publication Critical patent/JPS61144646U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1985028517U 1985-02-28 1985-02-28 Pending JPS61144646U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985028517U JPS61144646U (enExample) 1985-02-28 1985-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985028517U JPS61144646U (enExample) 1985-02-28 1985-02-28

Publications (1)

Publication Number Publication Date
JPS61144646U true JPS61144646U (enExample) 1986-09-06

Family

ID=30526462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985028517U Pending JPS61144646U (enExample) 1985-02-28 1985-02-28

Country Status (1)

Country Link
JP (1) JPS61144646U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100350448B1 (ko) * 1999-08-25 2002-08-28 삼성전자 주식회사 실리카 소결용 웨이퍼 카세트

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100350448B1 (ko) * 1999-08-25 2002-08-28 삼성전자 주식회사 실리카 소결용 웨이퍼 카세트

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