JPS61143760A - 縮小投影露光装置 - Google Patents
縮小投影露光装置Info
- Publication number
- JPS61143760A JPS61143760A JP60271455A JP27145585A JPS61143760A JP S61143760 A JPS61143760 A JP S61143760A JP 60271455 A JP60271455 A JP 60271455A JP 27145585 A JP27145585 A JP 27145585A JP S61143760 A JPS61143760 A JP S61143760A
- Authority
- JP
- Japan
- Prior art keywords
- image
- pattern
- reduction
- projected
- evaluation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7092—Signal processing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Holders For Sensitive Materials And Originals (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60271455A JPS61143760A (ja) | 1985-12-04 | 1985-12-04 | 縮小投影露光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60271455A JPS61143760A (ja) | 1985-12-04 | 1985-12-04 | 縮小投影露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61143760A true JPS61143760A (ja) | 1986-07-01 |
JPH0227811B2 JPH0227811B2 (zh) | 1990-06-20 |
Family
ID=17500268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60271455A Granted JPS61143760A (ja) | 1985-12-04 | 1985-12-04 | 縮小投影露光装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61143760A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0318960U (zh) * | 1989-06-29 | 1991-02-25 | ||
US5153916A (en) * | 1990-04-20 | 1992-10-06 | Hitachi, Ltd. | Method and apparatus for detecting focal plane |
JPH08167558A (ja) * | 1994-12-15 | 1996-06-25 | Nikon Corp | 投影露光装置 |
-
1985
- 1985-12-04 JP JP60271455A patent/JPS61143760A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0318960U (zh) * | 1989-06-29 | 1991-02-25 | ||
US5153916A (en) * | 1990-04-20 | 1992-10-06 | Hitachi, Ltd. | Method and apparatus for detecting focal plane |
JPH08167558A (ja) * | 1994-12-15 | 1996-06-25 | Nikon Corp | 投影露光装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0227811B2 (zh) | 1990-06-20 |
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