JPS61142861U - - Google Patents
Info
- Publication number
- JPS61142861U JPS61142861U JP2820185U JP2820185U JPS61142861U JP S61142861 U JPS61142861 U JP S61142861U JP 2820185 U JP2820185 U JP 2820185U JP 2820185 U JP2820185 U JP 2820185U JP S61142861 U JPS61142861 U JP S61142861U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition apparatus
- crucible
- shielding means
- discharge hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2820185U JPS61142861U (enExample) | 1985-02-26 | 1985-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2820185U JPS61142861U (enExample) | 1985-02-26 | 1985-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142861U true JPS61142861U (enExample) | 1986-09-03 |
Family
ID=30525867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2820185U Pending JPS61142861U (enExample) | 1985-02-26 | 1985-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142861U (enExample) |
-
1985
- 1985-02-26 JP JP2820185U patent/JPS61142861U/ja active Pending
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