JPS63199159U - - Google Patents
Info
- Publication number
- JPS63199159U JPS63199159U JP4929988U JP4929988U JPS63199159U JP S63199159 U JPS63199159 U JP S63199159U JP 4929988 U JP4929988 U JP 4929988U JP 4929988 U JP4929988 U JP 4929988U JP S63199159 U JPS63199159 U JP S63199159U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heater
- chamber
- nozzle
- nozzles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4929988U JPS63199159U (enExample) | 1988-04-14 | 1988-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4929988U JPS63199159U (enExample) | 1988-04-14 | 1988-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63199159U true JPS63199159U (enExample) | 1988-12-21 |
Family
ID=30871620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4929988U Pending JPS63199159U (enExample) | 1988-04-14 | 1988-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63199159U (enExample) |
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1988
- 1988-04-14 JP JP4929988U patent/JPS63199159U/ja active Pending