JPS61142454U - - Google Patents

Info

Publication number

JPS61142454U

JPS61142454U JP2485885U JP2485885U JPS61142454U JP S61142454 U JPS61142454 U JP S61142454U JP 2485885 U JP2485885 U JP 2485885U JP 2485885 U JP2485885 U JP 2485885U JP S61142454 U JPS61142454 U JP S61142454U

Authority

JP

Japan

Prior art keywords

volume

borides

silicides

carbides

silicon carbide

Prior art date

1985-02-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims 2
• -1 borides Chemical class 0.000 claims 1
• 150000001247 metal acetylides Chemical class 0.000 claims 1
• 150000004767 nitrides Chemical class 0.000 claims 1
• 230000000737 periodic effect Effects 0.000 claims 1
• 229910021332 silicide Inorganic materials 0.000 claims 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• 230000007704 transition Effects 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
• 229910052710 silicon Inorganic materials 0.000 description 4
• 239000010703 silicon Substances 0.000 description 4
• 238000010586 diagram Methods 0.000 description 3
• 239000012212 insulator Substances 0.000 description 2
• 239000011521 glass Substances 0.000 description 1
• 239000008188 pellet Substances 0.000 description 1