JPS6114103A - Ozonizer using ceramic - Google Patents

Ozonizer using ceramic

Info

Publication number
JPS6114103A
JPS6114103A JP59132675A JP13267584A JPS6114103A JP S6114103 A JPS6114103 A JP S6114103A JP 59132675 A JP59132675 A JP 59132675A JP 13267584 A JP13267584 A JP 13267584A JP S6114103 A JPS6114103 A JP S6114103A
Authority
JP
Japan
Prior art keywords
ozonizer
ceramic
cooling fluid
plate
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59132675A
Other languages
Japanese (ja)
Inventor
Senichi Masuda
増田 閃一
Shinji Nishio
西尾 信二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Tokushu Togyo KK
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Nippon Tokushu Togyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd, Nippon Tokushu Togyo KK filed Critical NGK Spark Plug Co Ltd
Priority to JP59132675A priority Critical patent/JPS6114103A/en
Publication of JPS6114103A publication Critical patent/JPS6114103A/en
Pending legal-status Critical Current

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  • Electrostatic Separation (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE:To obtain the titled ozonozer which is small-sized and has a large capacity by laminating a ceramic platy electric field device wherein a cooling fluid circulating hole is provided through an insulating corrugated sheet. CONSTITUTION:A cooling liquid circulating hole 11 is provided to a base plate 1 made of a ceramic dielectric, and linear ground electrodes 3, 3, etc. are furnished on the upper surface 2 in the direction vertical to the cooling fluid circulating hole 11. A sheet induction electrode 5 is provided above the cooling fluid circulating hole 11 at the inside of the terminal 5a of the sheet induction electrode are connected to an electric power source 4 to form a platy electric field device (the symbol 6 is an earth). The desired number of said platy electric field devices are laminated through an insulating corrugated sheet 7 so that the cooling fluid circulating hols 11 may cross vertically the axis of the corrugated sheet 7 (however, the corrugated sheet 7 is kept out of contact with the linear induction electrode 3). A laminated ozonizer is obtained in this way.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は何層かのオゾナイザ−よりなるセラミックを
用いたオゾナイザ−に関するものであり0□の酸化によ
る03の製造、NO,、、SOxの酸化による脱硝、税
硫等に関するものである。ここでオゾナイザ−とは絶縁
体に電極を設は高周波高・電圧を印加することにより高
周波コロナ放電を発生し、強力なイオン源として使用で
きる他、極端パルス高電圧を印加すれば、沿面コロナ放
電を生じ活性プラズマの形成により、放電化学作用を有
するものである。
Detailed Description of the Invention [Industrial Application Field] This invention relates to an ozonizer using a ceramic consisting of several layers of ozonizers, and is used for the production of 03 by oxidation of 0□, NO,..., SOx. This relates to denitrification by oxidation, sulfur removal, etc. An ozonizer is an insulator with electrodes that generates high-frequency corona discharge by applying high-frequency high voltage and can be used as a powerful ion source. It has a discharge chemical action by generating active plasma.

[従来の技術] 来オゾナイザ−は一般に平板状又は円筒状であるため容
量の大きい装置とするには一般に大きな平板又は円筒を
要し、これをセラミックで製作すると脆性のため破壊し
易いものであった。(特願昭57−155617号) [問題を解決するための手段] この発明はこの欠点を除外するもので、何層もの板状オ
ゾナイザ−を積み重ね容積小さく且つ容量の大きなオゾ
ナイザ−を提供するもので、アルミナ磁器、ジルコニア
磁器、窒化珪素磁器等のセラミック誘電体で形成せる基
板に複数の電極を設けてオゾナイザ−を形成し該電極と
非接触の状態に合成樹脂、ガラス又はセラミックの絶縁
体の波板又は格子状物を設置し、該波板又は格子状物と
をこれを繰り返した構造であることを特徴とするセラミ
ックを用いたオゾナイザ−において、オゾナイザ−とな
る基板中に波板又は格子状物と異なった方向に冷却流体
通過用の多数の流体通路を設けたものである。
[Prior art] Ozonizers are generally flat or cylindrical in shape, so a large flat or cylindrical device is generally required to create a device with a large capacity, and if they are made of ceramic, they are brittle and easily break. Ta. (Japanese Patent Application No. 57-155617) [Means for Solving the Problem] This invention eliminates this drawback and provides an ozonizer with a small volume and a large capacity by stacking many layers of plate-shaped ozonizers. An ozonizer is formed by providing a plurality of electrodes on a substrate made of a ceramic dielectric such as alumina porcelain, zirconia porcelain, or silicon nitride porcelain, and an insulator made of synthetic resin, glass, or ceramic is placed in a non-contact state with the electrodes. In an ozonizer using ceramic, which is characterized by having a structure in which a corrugated plate or a grid-like object is installed and the corrugated plate or grid-like object is repeated, the corrugated plate or grid is installed in the substrate that becomes the ozonizer. A large number of fluid passages for passage of cooling fluid are provided in different directions.

[実施例と作用効果] この発明を図によって説明するとセラミック誘電体で形
成した冷却流体流通熱11を線状電極と直角方向に有す
る基板1の上部表面2に端子3aと接合せる線状接地電
極3を設け、基板lの内部には面状誘導電極5を冷却流
体流通孔の上方に埋設し、前記線状接地電極3と、面状
誘導電極5との間には電界形成用電源4を接続し、電界
形成用電源4と線状接地電極3との間にアース6を設け
る。5aは面状誘導電極の両端である。又発明の板状オ
ゾナイザ−装置を造るには、例えばアルミナ粉末、ジル
コニア粉末、窒化珪素粉末のようなファインセラミック
際料に、バインダー例えば塩化ビニール・醋酸ビニール
の共重合体を添加し、混練後周知のハニカム押出し装置
により押出しこの表面にモリブデンやタングステン等の
導電材の粉末を含むペーストをスクリーン印刷して面状
誘導電極5を形成し、その塗布面に前記グリーンシート
と同材質のセラミックペーストを塗布乾燥し、その上部
表面に線状接地電極3.端子3aをスクリーン印刷する
。これを非酸化性雰囲気にて1600℃に1時間保持し
て焼結する。その後上部表面の線状接地電極部3にニッ
ケルメッキを施す。
[Embodiments and Effects] This invention will be explained with reference to the drawings. A linear ground electrode is connected to a terminal 3a on the upper surface 2 of a substrate 1 having a cooling fluid circulating heat 11 formed of a ceramic dielectric in a direction perpendicular to the linear electrode. A planar induction electrode 5 is buried inside the substrate l above the cooling fluid flow hole, and an electric field forming power source 4 is provided between the linear ground electrode 3 and the planar induction electrode 5. A ground 6 is provided between the electric field forming power source 4 and the linear ground electrode 3. 5a are both ends of the planar induction electrode. Furthermore, in order to manufacture the plate-shaped ozonizer device of the invention, a binder such as a copolymer of vinyl chloride and vinyl acetate is added to a fine ceramic material such as alumina powder, zirconia powder, and silicon nitride powder, and after kneading, a well-known method is used. Extruded using a honeycomb extrusion device, a paste containing powder of a conductive material such as molybdenum or tungsten is screen printed on the surface to form a planar induction electrode 5, and a ceramic paste made of the same material as the green sheet is applied to the applied surface. 3. Dry and place a linear ground electrode on its upper surface. Screen print the terminal 3a. This is held at 1600° C. for 1 hour in a non-oxidizing atmosphere and sintered. Thereafter, nickel plating is applied to the linear ground electrode portion 3 on the upper surface.

次に第3図に斜視図を示す合成樹脂、ガラス又はセラミ
ックよりなる波型構造物又は第4図に斜       
  1゜挽回を示す格子状物を製作し更にその上に第1
図に示す板状オゾナイザ−を設置しこれを所望枚数繰り
返す。最上層の板状オゾナイザ−は線状接地電極を下面
にして接地することができる。この断面図を第5図に示
す。波板又は格子状物と板状オゾナイザ−とは板状オゾ
ナイザ−の基板の表面2に適宜凹部9を設けたり、又は
接着剤10で接着し、使用中位置ずれを起こさない配慮
が好ましい。更に第6図の如(線状電極を中央のオゾナ
イザ−の基板の両側に設けることもできる。波板又は格
子状物を構成する材料は合成樹脂ではポリエチレン、フ
ェノール樹脂、塩化ビニール等、ガラスでは一般のシリ
カ・ソーダ・ガラス、結晶化ガラス、セラミックではア
ルミナ磁器、窒化珪素磁器、ジルコニア磁器等の他一般
陶磁器やセメント、アスベスト等でもよい。これらは押
し出し法で成形し、セラミック材料では適宜焼結温度で
焼成すれば製作可能である。接着剤は酢酸ビニール系、
エポキシ樹脂系、燐酸系や瞬間接着剤でも有効に利用で
きる。
Next, a corrugated structure made of synthetic resin, glass, or ceramic is shown in a perspective view in Figure 3, or a perspective view is shown in Figure 4.
A grid-like object showing 1° recovery was made, and the first
Install the plate-shaped ozonizer shown in the figure and repeat this process as many times as desired. The plate-shaped ozonizer in the uppermost layer can be grounded with the linear ground electrode facing downward. This sectional view is shown in FIG. It is preferable that the corrugated plate or lattice-like material and the plate-like ozonizer be properly provided with recesses 9 on the surface 2 of the substrate of the plate-like ozonizer, or bonded together with an adhesive 10, so that they do not shift in position during use. Furthermore, as shown in Figure 6 (linear electrodes can be provided on both sides of the central ozonizer substrate), the material constituting the corrugated plate or lattice-like material may be polyethylene, phenol resin, vinyl chloride, etc. in the case of synthetic resin, or polyethylene, phenol resin, vinyl chloride, etc. in the case of glass. General silica/soda glass, crystallized glass, ceramics such as alumina porcelain, silicon nitride porcelain, zirconia porcelain, etc., as well as general ceramics, cement, asbestos, etc. may be used.These are formed by extrusion, and ceramic materials are sintered as appropriate. It can be manufactured by firing at a certain temperature.The adhesive is vinyl acetate,
Epoxy resin-based, phosphoric acid-based and instant adhesives can also be used effectively.

このようにして製作したオゾナイザ−は比較的狭い空間
に何層かのオゾナイザ−を設置できるため容量大きく小
型のオゾナイザ−を設計でき、又波板や格子状物は線状
電極と非接触の状態に設置されるため、セラミック基板
内部及び表面に形成した複数の電極3.5間に高周波高
電圧を印加すると、表面の線状接地電極の外側に高周波
コロナ放電を発生し、強力なイオン源として使用しても
何ら損傷を晶こさず恒久的な使用に耐えるもので、粉体
の荷電、除電に使用でき、両電極間に極短パルス高電圧
を印加すれば誘電体表面2に沿う沿面コロナ放電を生°
じ、活性プラズマが形成され、放電化学作用が活発とな
りオゾナイザ−やNOx、SOXの酸化等に用いること
ができ、形状小さく容量の大きい気体酸化装置ふなる。
The ozonizer manufactured in this way allows several layers of ozonizers to be installed in a relatively small space, making it possible to design a compact ozonizer with a large capacity.Also, the corrugated plate or grid-like object can be placed in a non-contact state with the linear electrode. Since the ceramic substrate is installed in It can withstand permanent use without causing any damage even when used, and can be used to charge and remove static electricity from powder.If an ultra-short pulse high voltage is applied between both electrodes, a creeping corona along the dielectric surface 2 can be created. generates a discharge
At the same time, active plasma is formed and discharge chemical action becomes active, resulting in a gas oxidation device with a small size and large capacity, which can be used for ozonizers, oxidation of NOx, SOX, etc.

更に、線状電極を有する面の波板と冷却流体流通孔とは
、はぼ直角方向に設けられているため、02を波板の軸
方向に、冷却流体は流通孔11の開口方向に通せば、こ
れらは混同することなく流れ、発生する熱を容易に除去
冷却できるものである。
Furthermore, since the corrugated plate on the surface having the linear electrodes and the cooling fluid circulation holes are provided in a substantially perpendicular direction, 02 can be passed in the axial direction of the corrugated plate and the cooling fluid can be passed in the opening direction of the circulation holes 11. For example, they flow together without mixing and the heat generated can be easily removed and cooled.

なお、本発明は上記実施例に示した形の板状オゾナイザ
−のほかに、第7図に斜視図で示す如き基板の一面又は
両面に蛇行影線状電極12.13を設けたものや、第8
図に示す如き櫛歯影線状電極14.15を設けたものも
当然に利用できる。
In addition to the plate-shaped ozonizer shown in the above-mentioned embodiments, the present invention can also be applied to an ozonizer in which meandering shadow line electrodes 12 and 13 are provided on one or both sides of a substrate as shown in a perspective view in FIG. 8th
Of course, one provided with comb-teeth shadow line electrodes 14 and 15 as shown in the figure can also be used.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明のオゾナイザ−の1枚の基板の斜視図、
第2図は第1図のn−n断面図と本発明装置の使用状態
を示す回路図である。第3図は波板の斜視図、第4図は
格子状物の斜視図、第5図、第6図は本発明のセラミッ
クを用いたオゾナイザ−の第2図に相当する断面図と使
用状態を示す回路図である。第7図、第8図は別の実施
例のオゾナイザ−基板の斜視図である。 1・・・・・・基板、2・・・・・・被覆層、3・・・
・・・線状接地電極1,3 a・・・・・・端子、4・
・・・・・電界形成用電源、5・・・・・・面状誘導電
極、6・・・・・・アース、7・・・・・・波板、8・
・・・・・格子状物、9・・・・・・凹部、10・・・
・・・接着剤11・・・・・・冷却流体流通孔、12.
13・・・・・・蛇行型*1v!J 第2図 a 第3図 第4図 第5図
FIG. 1 is a perspective view of one substrate of the ozonizer of the present invention;
FIG. 2 is a sectional view taken along the line nn in FIG. 1 and a circuit diagram showing the state in which the device of the present invention is used. Fig. 3 is a perspective view of a corrugated plate, Fig. 4 is a perspective view of a lattice-like object, and Figs. 5 and 6 are sectional views and usage conditions corresponding to Fig. 2 of the ozonizer using the ceramic of the present invention. FIG. 7 and 8 are perspective views of another embodiment of the ozonizer substrate. 1...Substrate, 2...Coating layer, 3...
... Linear ground electrodes 1, 3 a ... Terminal, 4.
...Electric field forming power source, 5...Planar induction electrode, 6...Earth, 7...Corrugated plate, 8.
... Grid-like object, 9 ... Concavity, 10 ...
. . . Adhesive 11 . . . Cooling fluid circulation hole, 12.
13...Meandering type *1v! J Figure 2a Figure 3 Figure 4 Figure 5

Claims (3)

【特許請求の範囲】[Claims] (1) セラミック誘電体で形成してなる基板に複数の
電極を設けて板状のオゾナイザーを形成し、該電極と非
接触の状態に絶縁性の波板又は格子状物を設置し、該波
板又は格子状物と電極が非接触の状態に複数の電極をも
つ板状電界装置を設置し、所望によりこれを繰り返した
構造であるセラミックを用いたオゾナイザーにおいて、
板状電界装置の内部に波板又は格子状物の軸方向と異な
った方向に、多数の流体通路を設けたことを特徴とする
セラミックを用いたオゾナイザー。
(1) A plate-shaped ozonizer is formed by providing a plurality of electrodes on a substrate made of a ceramic dielectric, and an insulating corrugated plate or grid-like object is installed in a non-contact state with the electrodes. In an ozonizer using ceramic, which has a structure in which a plate-shaped electric field device with a plurality of electrodes is installed in a state where the plate or grid-like object and the electrodes are not in contact, and this is repeated as desired,
An ozonizer using ceramic, characterized in that a large number of fluid passages are provided inside a plate-shaped electric field device in a direction different from the axial direction of a corrugated plate or a grid-like object.
(2) セラミック誘電体がアルミナ磁器、ジルコニア
磁器、窒化珪素磁器である特許請求の範囲第1項記載の
セラミックを用いたオゾナイザー。
(2) An ozonizer using a ceramic according to claim 1, wherein the ceramic dielectric is alumina porcelain, zirconia porcelain, or silicon nitride porcelain.
(3) 波板又は格子状物が合成樹脂,ガラス又はセラ
ミックの絶縁体である特許請求の範囲第1項又は第2項
記載のセラミックを用いたオゾナイザー。
(3) An ozonizer using ceramic according to claim 1 or 2, wherein the corrugated plate or grid-like material is an insulator made of synthetic resin, glass, or ceramic.
JP59132675A 1984-06-26 1984-06-26 Ozonizer using ceramic Pending JPS6114103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59132675A JPS6114103A (en) 1984-06-26 1984-06-26 Ozonizer using ceramic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59132675A JPS6114103A (en) 1984-06-26 1984-06-26 Ozonizer using ceramic

Publications (1)

Publication Number Publication Date
JPS6114103A true JPS6114103A (en) 1986-01-22

Family

ID=15086871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59132675A Pending JPS6114103A (en) 1984-06-26 1984-06-26 Ozonizer using ceramic

Country Status (1)

Country Link
JP (1) JPS6114103A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224255A (en) * 1987-03-13 1988-09-19 Toshiba Corp Semiconductor device and manufacture thereof
JPS63167132U (en) * 1987-04-16 1988-10-31
JPH03150204A (en) * 1989-11-06 1991-06-26 Fuji Densetsu Kk Ozonizer equipped with air pump
US5102629A (en) * 1987-07-23 1992-04-07 Asahi Glass Company, Ltd. Field formation apparatus
EP0818415A1 (en) * 1996-07-10 1998-01-14 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
JP2010033914A (en) * 2008-07-29 2010-02-12 Kyocera Corp Dielectric structure, and discharge device and fluid reformer using the same
JP2010142758A (en) * 2008-12-19 2010-07-01 Daihatsu Motor Co Ltd Exhaust gas purification device
JP2010225493A (en) * 2009-03-25 2010-10-07 Kyocera Corp Plasma generator and plasma generating apparatus
CN106553999A (en) * 2015-09-28 2017-04-05 Elozo有限公司 Ozonator

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224255A (en) * 1987-03-13 1988-09-19 Toshiba Corp Semiconductor device and manufacture thereof
JPS63167132U (en) * 1987-04-16 1988-10-31
JPH0519298Y2 (en) * 1987-04-16 1993-05-21
US5102629A (en) * 1987-07-23 1992-04-07 Asahi Glass Company, Ltd. Field formation apparatus
JPH03150204A (en) * 1989-11-06 1991-06-26 Fuji Densetsu Kk Ozonizer equipped with air pump
EP0818415A1 (en) * 1996-07-10 1998-01-14 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
US5942196A (en) * 1996-07-10 1999-08-24 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
CN1117695C (en) * 1996-07-10 2003-08-13 三菱电机株式会社 Ozone generator
JP2010033914A (en) * 2008-07-29 2010-02-12 Kyocera Corp Dielectric structure, and discharge device and fluid reformer using the same
JP2010142758A (en) * 2008-12-19 2010-07-01 Daihatsu Motor Co Ltd Exhaust gas purification device
JP2010225493A (en) * 2009-03-25 2010-10-07 Kyocera Corp Plasma generator and plasma generating apparatus
CN106553999A (en) * 2015-09-28 2017-04-05 Elozo有限公司 Ozonator

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