JPS61139719A - 半導体回転センサ - Google Patents

半導体回転センサ

Info

Publication number
JPS61139719A
JPS61139719A JP59260782A JP26078284A JPS61139719A JP S61139719 A JPS61139719 A JP S61139719A JP 59260782 A JP59260782 A JP 59260782A JP 26078284 A JP26078284 A JP 26078284A JP S61139719 A JPS61139719 A JP S61139719A
Authority
JP
Japan
Prior art keywords
cantilever
cantilever beam
rotation sensor
slit
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59260782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374926B2 (enrdf_load_stackoverflow
Inventor
Tamotsu Tominaga
冨永　保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP59260782A priority Critical patent/JPS61139719A/ja
Publication of JPS61139719A publication Critical patent/JPS61139719A/ja
Publication of JPH0374926B2 publication Critical patent/JPH0374926B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Gyroscopes (AREA)
JP59260782A 1984-12-12 1984-12-12 半導体回転センサ Granted JPS61139719A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59260782A JPS61139719A (ja) 1984-12-12 1984-12-12 半導体回転センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59260782A JPS61139719A (ja) 1984-12-12 1984-12-12 半導体回転センサ

Publications (2)

Publication Number Publication Date
JPS61139719A true JPS61139719A (ja) 1986-06-27
JPH0374926B2 JPH0374926B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=17352650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59260782A Granted JPS61139719A (ja) 1984-12-12 1984-12-12 半導体回転センサ

Country Status (1)

Country Link
JP (1) JPS61139719A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0778458A1 (en) 1995-12-05 1997-06-11 Murata Manufacturing Co., Ltd. Angular velocity sensor
US5889208A (en) * 1991-12-06 1999-03-30 Canon Kabushiki Kaisha Angular velocity sensor having cantilever beams
USRE42359E1 (en) 1992-10-13 2011-05-17 Denso Corporation Dynamical quantity sensor
JP2011237390A (ja) * 2010-05-13 2011-11-24 Gunma Univ 加速度センサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5889208A (en) * 1991-12-06 1999-03-30 Canon Kabushiki Kaisha Angular velocity sensor having cantilever beams
USRE42359E1 (en) 1992-10-13 2011-05-17 Denso Corporation Dynamical quantity sensor
EP0778458A1 (en) 1995-12-05 1997-06-11 Murata Manufacturing Co., Ltd. Angular velocity sensor
JP2011237390A (ja) * 2010-05-13 2011-11-24 Gunma Univ 加速度センサ

Also Published As

Publication number Publication date
JPH0374926B2 (enrdf_load_stackoverflow) 1991-11-28

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