JPS61137951U - - Google Patents
Info
- Publication number
- JPS61137951U JPS61137951U JP2105585U JP2105585U JPS61137951U JP S61137951 U JPS61137951 U JP S61137951U JP 2105585 U JP2105585 U JP 2105585U JP 2105585 U JP2105585 U JP 2105585U JP S61137951 U JPS61137951 U JP S61137951U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- wafer
- resist
- brine
- detection end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 239000012267 brine Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2105585U JPS61137951U (enExample) | 1985-02-15 | 1985-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2105585U JPS61137951U (enExample) | 1985-02-15 | 1985-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61137951U true JPS61137951U (enExample) | 1986-08-27 |
Family
ID=30512106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2105585U Pending JPS61137951U (enExample) | 1985-02-15 | 1985-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61137951U (enExample) |
-
1985
- 1985-02-15 JP JP2105585U patent/JPS61137951U/ja active Pending
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