JPS61132833A - イオンポンプに給電しイオンポンプ内の圧力を測定する電気装置 - Google Patents

イオンポンプに給電しイオンポンプ内の圧力を測定する電気装置

Info

Publication number
JPS61132833A
JPS61132833A JP60263982A JP26398285A JPS61132833A JP S61132833 A JPS61132833 A JP S61132833A JP 60263982 A JP60263982 A JP 60263982A JP 26398285 A JP26398285 A JP 26398285A JP S61132833 A JPS61132833 A JP S61132833A
Authority
JP
Japan
Prior art keywords
circuit
ion pump
pressure
voltage
electrical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60263982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0321856B2 (enExample
Inventor
ブツソ マリオ
ピエリニ マルコ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of JPS61132833A publication Critical patent/JPS61132833A/ja
Publication of JPH0321856B2 publication Critical patent/JPH0321856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M5/00Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases
    • H02M5/02Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC
    • H02M5/04Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC by static converters
    • H02M5/22Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M5/275Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M5/293Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05FSYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10Regulating voltage or current 
    • G05F1/12Regulating voltage or current  wherein the variable actually regulated by the final control device is AC
    • G05F1/14Regulating voltage or current  wherein the variable actually regulated by the final control device is AC using tap transformers or tap changing inductors as final control devices
    • G05F1/16Regulating voltage or current  wherein the variable actually regulated by the final control device is AC using tap transformers or tap changing inductors as final control devices combined with discharge tubes or semiconductor devices
    • G05F1/20Regulating voltage or current  wherein the variable actually regulated by the final control device is AC using tap transformers or tap changing inductors as final control devices combined with discharge tubes or semiconductor devices semiconductor devices only
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P13/00Arrangements for controlling transformers, reactors or choke coils, for the purpose of obtaining a desired output
    • H02P13/06Arrangements for controlling transformers, reactors or choke coils, for the purpose of obtaining a desired output by tap-changing; by rearranging interconnections of windings

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electronic Switches (AREA)
JP60263982A 1984-11-28 1985-11-26 イオンポンプに給電しイオンポンプ内の圧力を測定する電気装置 Granted JPS61132833A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT68182-A/84 1984-11-28
IT68182/84A IT1179833B (it) 1984-11-28 1984-11-28 Dispositivo elettronico per l alimentazione di una pompa ionica a due tensioni differenziate e per la misura perfezionata della pressione vigente in detta pompa

Publications (2)

Publication Number Publication Date
JPS61132833A true JPS61132833A (ja) 1986-06-20
JPH0321856B2 JPH0321856B2 (enExample) 1991-03-25

Family

ID=11308380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60263982A Granted JPS61132833A (ja) 1984-11-28 1985-11-26 イオンポンプに給電しイオンポンプ内の圧力を測定する電気装置

Country Status (5)

Country Link
US (1) US4713619A (enExample)
EP (1) EP0183307B1 (enExample)
JP (1) JPS61132833A (enExample)
DE (1) DE3579999D1 (enExample)
IT (1) IT1179833B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1219207B (it) * 1988-04-14 1990-05-03 Varian Spa Alimentatore elettronico perfezionato per pompa ionica
US6559562B1 (en) * 2001-12-14 2003-05-06 Ssi Power, Llc Voltage sag and over-voltage compensation device with pulse width modulated autotransformer
JP6062246B2 (ja) * 2009-07-15 2017-01-18 インテグレイテッド・デザインズ・リミテッド・パートナーシップIntegrated Designs,L.P. モーター電流に基づいてポンプ圧を決定する調整回路および方法
JP2015095378A (ja) * 2013-11-13 2015-05-18 株式会社日立ハイテクノロジーズ 高電圧発生回路およびそれを用いたイオンポンプ
EP4524166A1 (en) 2023-09-13 2025-03-19 Abu Dhabi Polymers Co. Ltd (Borouge) - Sole Proprietorship L.L.C. Polypropylene composition for injection molded articles

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2504017A (en) * 1945-09-19 1950-04-11 Honeywell Regulator Co Electrical regulator
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
US3429501A (en) * 1965-08-30 1969-02-25 Bendix Corp Ion pump
DE3268691D1 (en) * 1982-09-30 1986-03-06 Ant Nachrichtentech Direct voltage converter with a pulse width controlled semiconductor switch
US4574223A (en) * 1984-01-12 1986-03-04 Hid Systems, Inc. Fast warmup ballast for HID lamps

Also Published As

Publication number Publication date
EP0183307A3 (en) 1987-11-11
IT8468182A0 (it) 1984-11-28
DE3579999D1 (de) 1990-11-08
IT1179833B (it) 1987-09-16
JPH0321856B2 (enExample) 1991-03-25
EP0183307A2 (en) 1986-06-04
US4713619A (en) 1987-12-15
EP0183307B1 (en) 1990-10-03
IT8468182A1 (it) 1986-05-28

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