JPS61131835U - - Google Patents

Info

Publication number

JPS61131835U

JPS61131835U JP1469585U JP1469585U JPS61131835U JP S61131835 U JPS61131835 U JP S61131835U JP 1469585 U JP1469585 U JP 1469585U JP 1469585 U JP1469585 U JP 1469585U JP S61131835 U JPS61131835 U JP S61131835U

Authority

JP

Japan

Prior art keywords

recess

jig

semiconductor substrate

utility

model registration

Prior art date

1985-02-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 9
• 239000004065 semiconductor Substances 0.000 claims description 7
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 229910001220 stainless steel Inorganic materials 0.000 claims 1
• 239000010935 stainless steel Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2