JPS6113049Y2 - - Google Patents

Info

Publication number
JPS6113049Y2
JPS6113049Y2 JP1701382U JP1701382U JPS6113049Y2 JP S6113049 Y2 JPS6113049 Y2 JP S6113049Y2 JP 1701382 U JP1701382 U JP 1701382U JP 1701382 U JP1701382 U JP 1701382U JP S6113049 Y2 JPS6113049 Y2 JP S6113049Y2
Authority
JP
Japan
Prior art keywords
air
small
filter
filtration device
rectifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1701382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58119824U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1701382U priority Critical patent/JPS58119824U/ja
Publication of JPS58119824U publication Critical patent/JPS58119824U/ja
Application granted granted Critical
Publication of JPS6113049Y2 publication Critical patent/JPS6113049Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP1701382U 1982-02-12 1982-02-12 空気浄化用ろ過装置 Granted JPS58119824U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1701382U JPS58119824U (ja) 1982-02-12 1982-02-12 空気浄化用ろ過装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1701382U JPS58119824U (ja) 1982-02-12 1982-02-12 空気浄化用ろ過装置

Publications (2)

Publication Number Publication Date
JPS58119824U JPS58119824U (ja) 1983-08-15
JPS6113049Y2 true JPS6113049Y2 (en:Method) 1986-04-23

Family

ID=30029347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1701382U Granted JPS58119824U (ja) 1982-02-12 1982-02-12 空気浄化用ろ過装置

Country Status (1)

Country Link
JP (1) JPS58119824U (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4789352B2 (ja) * 2001-06-19 2011-10-12 キヤノン株式会社 露光装置およびデバイス製造方法

Also Published As

Publication number Publication date
JPS58119824U (ja) 1983-08-15

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