JPS6112679Y2 - - Google Patents

Info

Publication number
JPS6112679Y2
JPS6112679Y2 JP9606181U JP9606181U JPS6112679Y2 JP S6112679 Y2 JPS6112679 Y2 JP S6112679Y2 JP 9606181 U JP9606181 U JP 9606181U JP 9606181 U JP9606181 U JP 9606181U JP S6112679 Y2 JPS6112679 Y2 JP S6112679Y2
Authority
JP
Japan
Prior art keywords
wafer
pair
catch
prime mover
forth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9606181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS583040U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9606181U priority Critical patent/JPS583040U/ja
Publication of JPS583040U publication Critical patent/JPS583040U/ja
Application granted granted Critical
Publication of JPS6112679Y2 publication Critical patent/JPS6112679Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Tunnel Furnaces (AREA)
JP9606181U 1981-06-30 1981-06-30 ウエハの搬送装置 Granted JPS583040U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9606181U JPS583040U (ja) 1981-06-30 1981-06-30 ウエハの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9606181U JPS583040U (ja) 1981-06-30 1981-06-30 ウエハの搬送装置

Publications (2)

Publication Number Publication Date
JPS583040U JPS583040U (ja) 1983-01-10
JPS6112679Y2 true JPS6112679Y2 (enrdf_load_html_response) 1986-04-19

Family

ID=29890943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9606181U Granted JPS583040U (ja) 1981-06-30 1981-06-30 ウエハの搬送装置

Country Status (1)

Country Link
JP (1) JPS583040U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS583040U (ja) 1983-01-10

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