JPS61125172U - - Google Patents
Info
- Publication number
- JPS61125172U JPS61125172U JP971985U JP971985U JPS61125172U JP S61125172 U JPS61125172 U JP S61125172U JP 971985 U JP971985 U JP 971985U JP 971985 U JP971985 U JP 971985U JP S61125172 U JPS61125172 U JP S61125172U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- semiconductor wafers
- etching chamber
- chamber
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP971985U JPS61125172U (enExample) | 1985-01-25 | 1985-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP971985U JPS61125172U (enExample) | 1985-01-25 | 1985-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61125172U true JPS61125172U (enExample) | 1986-08-06 |
Family
ID=30490207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP971985U Pending JPS61125172U (enExample) | 1985-01-25 | 1985-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61125172U (enExample) |
-
1985
- 1985-01-25 JP JP971985U patent/JPS61125172U/ja active Pending