JPS61125043U - - Google Patents

Info

Publication number
JPS61125043U
JPS61125043U JP899085U JP899085U JPS61125043U JP S61125043 U JPS61125043 U JP S61125043U JP 899085 U JP899085 U JP 899085U JP 899085 U JP899085 U JP 899085U JP S61125043 U JPS61125043 U JP S61125043U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
holders
pairs
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP899085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543470Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985008990U priority Critical patent/JPH0543470Y2/ja
Publication of JPS61125043U publication Critical patent/JPS61125043U/ja
Application granted granted Critical
Publication of JPH0543470Y2 publication Critical patent/JPH0543470Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1985008990U 1985-01-25 1985-01-25 Expired - Lifetime JPH0543470Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985008990U JPH0543470Y2 (enExample) 1985-01-25 1985-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985008990U JPH0543470Y2 (enExample) 1985-01-25 1985-01-25

Publications (2)

Publication Number Publication Date
JPS61125043U true JPS61125043U (enExample) 1986-08-06
JPH0543470Y2 JPH0543470Y2 (enExample) 1993-11-02

Family

ID=30488782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985008990U Expired - Lifetime JPH0543470Y2 (enExample) 1985-01-25 1985-01-25

Country Status (1)

Country Link
JP (1) JPH0543470Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921020A (ja) * 1982-07-27 1984-02-02 Nippon Telegr & Teleph Corp <Ntt> 荷電ビ−ム露光装置用成形絞り

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921020A (ja) * 1982-07-27 1984-02-02 Nippon Telegr & Teleph Corp <Ntt> 荷電ビ−ム露光装置用成形絞り

Also Published As

Publication number Publication date
JPH0543470Y2 (enExample) 1993-11-02

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