JPS61123531U - - Google Patents
Info
- Publication number
- JPS61123531U JPS61123531U JP603785U JP603785U JPS61123531U JP S61123531 U JPS61123531 U JP S61123531U JP 603785 U JP603785 U JP 603785U JP 603785 U JP603785 U JP 603785U JP S61123531 U JPS61123531 U JP S61123531U
- Authority
- JP
- Japan
- Prior art keywords
- hard
- hard plate
- stand
- semiconductor wafer
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603785U JPS61123531U (de) | 1985-01-19 | 1985-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603785U JPS61123531U (de) | 1985-01-19 | 1985-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123531U true JPS61123531U (de) | 1986-08-04 |
Family
ID=30483106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP603785U Pending JPS61123531U (de) | 1985-01-19 | 1985-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123531U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02301137A (ja) * | 1989-05-15 | 1990-12-13 | Toshiba Mach Co Ltd | ポリシング装置 |
-
1985
- 1985-01-19 JP JP603785U patent/JPS61123531U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02301137A (ja) * | 1989-05-15 | 1990-12-13 | Toshiba Mach Co Ltd | ポリシング装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61123531U (de) | ||
| JPS6239968U (de) | ||
| JP2555228Y2 (ja) | ダイシング装置 | |
| JPH0230211Y2 (de) | ||
| JPS6115733U (ja) | 基板付着物の削除装置 | |
| JPS6084251U (ja) | 遊星回転式研摩装置 | |
| JPH0325234U (de) | ||
| JPH0639869Y2 (ja) | 真空チャック | |
| JPH01168551U (de) | ||
| JPS6397454U (de) | ||
| JPS61125045U (de) | ||
| JPH028134U (de) | ||
| JPS6395241U (de) | ||
| JPS59104533U (ja) | レジスト処理装置 | |
| JPS6163835U (de) | ||
| JPS61133556U (de) | ||
| JPH02132941U (de) | ||
| JPS63100825U (de) | ||
| JPH0353848U (de) | ||
| JPS61136543U (de) | ||
| JPH0223951U (de) | ||
| JPH0193725U (de) | ||
| JPH0265333U (de) | ||
| JPS6211562U (de) | ||
| JPH0171441U (de) |