JPS61125045U - - Google Patents
Info
- Publication number
- JPS61125045U JPS61125045U JP819685U JP819685U JPS61125045U JP S61125045 U JPS61125045 U JP S61125045U JP 819685 U JP819685 U JP 819685U JP 819685 U JP819685 U JP 819685U JP S61125045 U JPS61125045 U JP S61125045U
- Authority
- JP
- Japan
- Prior art keywords
- suction table
- semiconductor manufacturing
- manufacturing device
- cleaning
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 description 2
- 238000005201 scrubbing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP819685U JPS61125045U (de) | 1985-01-23 | 1985-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP819685U JPS61125045U (de) | 1985-01-23 | 1985-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61125045U true JPS61125045U (de) | 1986-08-06 |
Family
ID=30487259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP819685U Pending JPS61125045U (de) | 1985-01-23 | 1985-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61125045U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0283927A (ja) * | 1988-09-21 | 1990-03-26 | Shibaura Eng Works Co Ltd | ガラス基板の乾燥装置 |
-
1985
- 1985-01-23 JP JP819685U patent/JPS61125045U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0283927A (ja) * | 1988-09-21 | 1990-03-26 | Shibaura Eng Works Co Ltd | ガラス基板の乾燥装置 |