JPS62120341U - - Google Patents
Info
- Publication number
- JPS62120341U JPS62120341U JP670286U JP670286U JPS62120341U JP S62120341 U JPS62120341 U JP S62120341U JP 670286 U JP670286 U JP 670286U JP 670286 U JP670286 U JP 670286U JP S62120341 U JPS62120341 U JP S62120341U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- semiconductor wafer
- saucer
- tank
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP670286U JPS62120341U (de) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP670286U JPS62120341U (de) | 1986-01-21 | 1986-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120341U true JPS62120341U (de) | 1987-07-30 |
Family
ID=30789463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP670286U Pending JPS62120341U (de) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120341U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11128813A (ja) * | 1997-10-31 | 1999-05-18 | Tokyo Electron Ltd | 塗布処理方法および塗布処理装置 |
-
1986
- 1986-01-21 JP JP670286U patent/JPS62120341U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11128813A (ja) * | 1997-10-31 | 1999-05-18 | Tokyo Electron Ltd | 塗布処理方法および塗布処理装置 |