JPS63155629U - - Google Patents
Info
- Publication number
- JPS63155629U JPS63155629U JP4928687U JP4928687U JPS63155629U JP S63155629 U JPS63155629 U JP S63155629U JP 4928687 U JP4928687 U JP 4928687U JP 4928687 U JP4928687 U JP 4928687U JP S63155629 U JPS63155629 U JP S63155629U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- elevator
- chamber performs
- processing chamber
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4928687U JPS63155629U (de) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4928687U JPS63155629U (de) | 1987-03-31 | 1987-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63155629U true JPS63155629U (de) | 1988-10-12 |
Family
ID=30871593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4928687U Pending JPS63155629U (de) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63155629U (de) |
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1987
- 1987-03-31 JP JP4928687U patent/JPS63155629U/ja active Pending