JPS6112203B2 - - Google Patents

Info

Publication number
JPS6112203B2
JPS6112203B2 JP52052772A JP5277277A JPS6112203B2 JP S6112203 B2 JPS6112203 B2 JP S6112203B2 JP 52052772 A JP52052772 A JP 52052772A JP 5277277 A JP5277277 A JP 5277277A JP S6112203 B2 JPS6112203 B2 JP S6112203B2
Authority
JP
Japan
Prior art keywords
measuring device
optical system
deviation
light
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52052772A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53138367A (en
Inventor
Toshio Toyoda
Akinobu Ogasawara
Satoru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP5277277A priority Critical patent/JPS53138367A/ja
Publication of JPS53138367A publication Critical patent/JPS53138367A/ja
Publication of JPS6112203B2 publication Critical patent/JPS6112203B2/ja
Granted legal-status Critical Current

Links

JP5277277A 1977-05-09 1977-05-09 Optical distance measuring apparatus Granted JPS53138367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5277277A JPS53138367A (en) 1977-05-09 1977-05-09 Optical distance measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5277277A JPS53138367A (en) 1977-05-09 1977-05-09 Optical distance measuring apparatus

Publications (2)

Publication Number Publication Date
JPS53138367A JPS53138367A (en) 1978-12-02
JPS6112203B2 true JPS6112203B2 (de) 1986-04-07

Family

ID=12924148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5277277A Granted JPS53138367A (en) 1977-05-09 1977-05-09 Optical distance measuring apparatus

Country Status (1)

Country Link
JP (1) JPS53138367A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8302228A (nl) * 1983-06-22 1985-01-16 Optische Ind De Oude Delft Nv Meetstelsel voor het onder gebruikmaking van een op driehoeksmeting berustend principe, contactloos meten van een door een oppervlakcontour van een objectvlak gegeven afstand tot een referentieniveau.
JP3259475B2 (ja) * 1993-10-27 2002-02-25 ミノルタ株式会社 距離測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519623A (en) * 1974-07-12 1976-01-26 Matsushita Electric Ind Co Ltd Isobunrigatakaraasatsuzosochi
JPS5120907A (ja) * 1974-08-15 1976-02-19 Dai Ichi Kogyo Seiyaku Co Ltd Senjozai

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519623A (en) * 1974-07-12 1976-01-26 Matsushita Electric Ind Co Ltd Isobunrigatakaraasatsuzosochi
JPS5120907A (ja) * 1974-08-15 1976-02-19 Dai Ichi Kogyo Seiyaku Co Ltd Senjozai

Also Published As

Publication number Publication date
JPS53138367A (en) 1978-12-02

Similar Documents

Publication Publication Date Title
US4764016A (en) Instrument for measuring the topography of a surface
JP2913984B2 (ja) 傾斜角測定装置
US4356392A (en) Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed
EP0208276B1 (de) Optische Messanordnung
JP2618377B2 (ja) 無接触測定用のf−シータ補正されたテレセントリツク系対物鏡を有する装置
JP2771546B2 (ja) 孔内面測定装置
JPS5979104A (ja) 光学装置
JPS6112203B2 (de)
JPS6161070B2 (de)
JPS57199909A (en) Distance measuring device
JP2698446B2 (ja) 間隔測定装置
JPH0479522B2 (de)
JPH0721409B2 (ja) 光学的距離検出装置
JPS6117908A (ja) 3次元形状測定装置
JPS6242327Y2 (de)
JPH0219403B2 (de)
JPH03130639A (ja) Mtf測定装置の光軸整合方法
JPH06137827A (ja) 光学的段差測定器
JPH0652168B2 (ja) 3次元形状測定装置
SU754203A1 (ru) Фотоэлектрическое устройство для измерения угловых разворотов 1
JPH08166209A (ja) 多面鏡評価装置
JPH01233310A (ja) 光学式面形状測定方法および面形状測定用光学式プローブ
JP2973017B2 (ja) 焦点検出装置
JPH01267407A (ja) 変位測定装置
JPS63252204A (ja) 距離・傾斜角測定器