JPS61121869A - Feeding device for ingot member - Google Patents

Abstract

PURPOSE:To prevent an ingot member such as silicon from being damaged and to improve working efficiency by definitely positioning a supplying mechanism by a supporting means against a mounting base for a cutting device in mounting the above member on the supplying mechanism and cutting it. CONSTITUTION:A supplying mechanism 2 mounting an ingot member W is moved on rails 72 through a carrying truck 13, and is mounted on a mounting base 3 which has been raised or lowered by the lifting device 68 of a supporting base to fit their dovetails 67 each other. In the next stage, the ingot member W is approached to a cutting edge 7a composed of the row of wires fixed on a cutting device 5 by means of the lifting device 68, and is cut after its position has been adjusted by the feeding mechanism 22. The cut ingot member W is moved on the carrying truck 13 again as it has been mounted on the supplying mechanism 2, and is carried to a fix position to device into each wafer. Thus the wafer can be efficiently cut without its damage.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention is directed to cutting (including cutting off and notching) a member to be cut (hereinafter referred to as an ingot member) made of a highly hard and brittle material such as a semiconductor material, a magnetic material, or a ceramic material. The present invention relates to a feeding device for feeding a cutting device.

(Prior art and its problems) The cutting device for cutting the above-mentioned ingot members into wafer shapes is usually equipped with a feeding mechanism that sequentially feeds the ingot members (for example, Japanese Patent Publication No. 54-18789). Recently, it has become possible to manufacture ingot members with large diameters and long lengths, and those with a weight of nearly 100 marks or more are being manufactured.

Therefore, attaching this directly to the cutting device requires a considerable amount of labor and time, and is likely to cause damage, and the wasted time leads to problems such as a decrease in the working efficiency of the cutting device.

In view of this, the present invention places an ingot member on a supply mechanism that is detachably attached to a cutting device, and this supply mechanism is provided with a feeding mechanism for the ingot member, thereby making it easy to attach the ingot member to the cutting device. The purpose is to smooth it out and enable fine adjustment of one feed.

[Means for solving problems]

That is, the ingot member feeding device of the present invention includes a feeding mechanism for placing the ingot member and a mounting base provided on the ingot member cutting device, and the feeding mechanism is provided with a feeding mechanism for moving the ingot member in a fine direction. with 1
The supply mechanism and the mounting base are characterized in that they include support means for removably attaching the supply mechanism to the mounting base.

〔Example〕

FIG. 1 is a side view showing the ingot member supply device of the present invention attached to a cutting device, and FIG. 2 is a front view thereof.

The supply device 1 includes a supply mechanism 2 to which the ingot member W is attached.
and a mounting base 3 attached to the ingot member support base 6 of the cutting device 5.

The cutting device 5 is a wire type cutting machine as an example,
The wire 7 is wound around three rollers 8&, 8b, and 8° at a predetermined pitch, and the lower p-ra Bb is wound.

The wire row between 80 and 80 is used as the cutting blade 7&, and the ingot member W is supported by the support stand 6 while the wire 7 is traveling at high speed.
The wafers are gradually raised to form a large number of wafers at the same time.

The ingot member W is made of an electronic material such as silicon, for example, and an auxiliary piece 10 made of ceramic 7 and/or the like is adhered to the lower side over almost the entire length. It is attached. The slide base 1 has a substantially trapezoidal cross section, and a rack member is attached to the lower surface over the entire length. (See Figures 5 and 6) The supply mechanism 2 is shown in Figures 3 and 4. However, the figure shows a state in which the supply mechanism 2 is mounted on a carrier 13 for convenience of transportation.

The supply mechanism 2 includes a pedestal 15 that supports the ingot member W, that is, a slide base U, and a pedestal 16 that supports the pedestal 15. As shown in FIG. 5, the pedestal 15 has a fitting groove 17 for inserting the slide base U and a long groove 18 for accommodating the rack plate on its upper surface. The fitting groove 17K is the contact plate 1 that comes into contact with one side of the slide base U.
9, and -(K of the pedestal 15 is provided with a fixing means side for pressing this contact plate 19 and fixing the slide base 11.

This fixing means 20 can have any suitable structure, but this example shows a structure using a plurality of cylinders. However, instead of this cylinder, it may be fixed with screws or the like, but a cylinder or electromagnetic type is convenient for remote control.

A block-shaped mounting board 21 is protruded from the lower part of one side of the pedestal 15, and this mounting board 21 is provided with a driving member O that engages with the rack 12, and the ingot member is fed by the rack 12 and the driving member n. Form a mechanism.

This drive member n includes a pinion 24 that meshes with the rack retainer, a worm gear 26 that is attached to a pinion shaft 25, and a worm n that meshes with the worm gear 26 and is driven by a drive motor A. The drive motor 28 is
For example, a stepping motor or the like is used to enable fine feeding and continuous feeding of the ingot member W at a fixed pitch. This driving member n may be manually fed depending on the case. However, in this case, the feedout dimension is 'ft! It is preferable to install a length measuring device that detects the length visually.

The support base 16 of this example is provided with a mounting angle adjusting means 30 for the ingot member W. This support stand 16 is the support stand 15
It consists of a rotating table that supports the rotating table 35 so as to be rotatable in the vertical direction, and a base 36 that supports the rotating table 35 so as to be rotatable in the horizontal direction.

The mounting angle adjustment means 30 includes a vertical movement means 31 and a horizontal rotation means 32. The vertical movement means 31 includes a shaft support 37 that pivotally supports the mounting board 21 of the receiver 15, and a rotation base. 3
It consists of a push-up member such as a jack provided at the rear end of 5 and a fixing part 39 that fixes it at a predetermined angle.

The shaft support 37 is provided protruding from the front end of the rotating table 35 and is attached to the mounting board 21.
It consists of a support yoke 40 that clamps the yoke and a horizontal bin 41 that passes through them. The fixing part 39 consists of an adjustment arm 42 that projects downward from a suitable position at the rear of the cradle 15, and a fixing arm 42 that protrudes from the rotating base and fixes the adjustment arm 42. 43 is bored with 44 elongated holes in the vertical direction, and a horizontal screw rod 45 is fixed to the adjustment arm 42, and the screw rod 45 is passed through the elongated hole 4 and fixed with a tightening nut 46.

The horizontal rotation means 32 includes a shaft support 50 provided at the tip of each of the rotation table 35 and the base 36, and an adjustment portion 51 and a fixing portion 52 provided at the rear. The shaft support 50 is
A support shaft 53 implanted at the tip of the base 36 is inserted into a through hole provided at the front end of the rotating base 35, and the adjusting part 51 swings between the screw frames on the rear side of the rotating base 35. movably pivoted,
One side of the base 36 is provided with a support plate that penetrates between the screw frames, and moves back and forth between the screw frames by means of an arrow 57. urge

The fixed part 52 has a screw rod ω, 60 implanted in the base 36,
It consists of a long hole 61.61 drilled in the rotating table 35, and is fastened with a tightening nut 62.62. The example shown is a screw rod ω
Although an example is shown in which two sets of elongated holes 61 are provided, it is of course possible to provide one set in some cases.

The lower part of the base 36 and the mounting base 3 are formed with a support means group for removably mounting the base 36, that is, the supply mechanism 2 on the mounting base 3. This support means is composed of, for example, a dovetail groove formed on the lower surface of the base 36 and a dovetail member 67 formed on the upper surface of the mounting base 3. The dovetail groove is formed in the longitudinal direction of the base 36, and the dovetail member a is provided at right angles to the cutting blade 7a.

The support base 6 that supports the mounting base 3 is equipped with a lifting platform 69 that is raised and lowered by means of a lifting means, and the mounting base 3 is mounted on the lifting stage ω. A dovetail member 70 is formed in the same manner as the mounting base 3, and fits into the dovetail groove 6 of the base 36, and a guide roller 71 is attached to the lower part of the conveyance vehicle 13@This allows the conveyance vehicle 13 to be connected to the cutting device 5. By moving along the guide rail 72 attached to the carriage 13, the feeding mechanism 2 placed on the carriage 13 is guided to the support stand 6 side, and the dovetail members 70, 67 of the carriage 13 and the mounting stand 3 are aligned. This allows the feeding mechanism 2 to be moved onto the mounting base 3.

[Effect]

The axis of the ingot member W placed on the supply mechanism 2 is adjusted by the mounting angle adjusting means 30 as necessary to set it at a predetermined angle. The reference in this case is preferably the center line of the dovetail groove 6.

When transferring the feeding mechanism 2 onto the mounting base 3 of the cutting device 5, the operator may carry it with both hands, but if the weight is large as mentioned above, it is recommended to use the conveying cart 13. preferable. In this case, the carriage 13 is moved along the guide rail 72 as described above, and the mounting base 3 is raised and lowered by the lifting means of the support base 6, and between the dovetail grooves of the supply mechanism 2 and the dovetail member C of the mounting base 3. The supply mechanism 2 is moved from the conveyor truck 13 onto the mounting base 3, and the supply mechanism 1 is moved by appropriate means (@not shown).
Fix 2.

Next, the ingot member W is brought close to the cutting blade 7a having the wire row by the elevating means, the fixing means 20 is slightly loosened, and the ingot member W is moved forward and backward by the feeder wII22 to determine the cutting position, and then the fixing means is applied. The ingot member W is fixed and cut by known means.

After cutting is completed, the mounting base 3 is lowered, the fixing means is loosened, and the ingot member is advanced by a predetermined amount by the feeding mechanism 22.
The cutting is then carried out in the above manner.@Note that during the above cutting, the auxiliary piece 10 is usually not cut halfway, and the ingot member after the above cutting has been completed. While still attached to the supply mechanism 2, the W is again transferred to the carrier 13, transported to a predetermined position, and separated into individual wafers.

〔Effect of the invention〕

According to the present invention, the ingot member is attached to the supply mechanism, and during cutting, the supply mechanism is positioned with respect to the mounting base of the cutting device by the support means, so that the ingot member can be attached to the cutting device very easily. I can do it. Moreover, since the supply mechanism has a feeding mechanism,
When cutting a long ingot, it is possible to sequentially feed the ingot and adjust the feed amount. Furthermore, when using a wire-type cutting device to form a large number of wafers at the same time, first making cuts and then separating them into individual wafers, the ingot member can be taken out together with the feeding mechanism, so there is no risk of damaging the wafers during unloading. It has the effect of not having any effect.

[Brief explanation of drawings]

Fig. 1 is a side view showing the ingot member feeding device of the present invention attached to a cutting device, Fig. 2 is a front view thereof, and Fig. 3
4 and 4 show the supply mechanism mounted on the conveyor truck, FIG. 3 is a front view thereof, FIG. 4 is a right side view, FIGS. 5 and 6 are related to the slide pace, and FIG. is a front view, Figure 6 is a right side view, Figures 7 to 9 relate to the cradle, and Figure 7 is a right side view.
The figure is a front view, figure 8 is a bottom view, figure 9 is a right side view,
Figures 0 to 12 relate to the rotating table; 1 Figure 10 is a front view;
Figure 11 is a plan view, Figure 12 is a right side view, Figures 13 to 15 are of the base, Figure 13 is a partially cutaway front view, Figure 14 is a plan view, and Figure 15 is the right side. It is a front view. 1 is a supply device, 2 is a supply mechanism, 3 is a mounting base) 5 is a cutting device, 22 is a feeding mechanism, 1 is a support means, and W is an ingot member. Patent originator Sumitomo Metal Industries, Ltd. Figure 1 Figure 2 Figure 10 Figure 14b Figure 15

Claims (1)

[Claims] It consists of a supply mechanism for placing the ingot member and a mounting base provided on the ingot member cutting device, and the supply mechanism is provided with a feeding mechanism for moving the ingot member in the axial direction, and the supply mechanism and the mounting base are provided with a feeding mechanism for moving the ingot member in the axial direction. 1. An ingot member feeding device comprising support means for removably attaching a feeding mechanism to a mounting base.