JPS61100414A - Feeder for ingot member - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention supplies a material having a crystal axis, such as an ingot of a semiconductor material (hereinafter simply referred to as an ingot member), to a processing device such as a cutting device that cuts or inclines into a wafer shape. The present invention relates to a feeding device for feeding.

Prior Art and Problems to be Solved When cutting the semiconductor material 1, for example, a silicon ingot into a whole unibar shape, it is required to cut at a required angle (hereinafter referred to as goniogonal angle) 2 with respect to the crystal axis of the ingot. There may be cases where For this reason, a gonio angle setting means is usually provided at the processing station, and means for attaching the ingot member with a required gonio angle is adopted. However, there is a problem that the angle If sub-adjustment takes place for the entire time, leading to a decrease in the operating rate of the processing equipment.

In view of this, an object of the present invention is to provide a supply bag which can be attached to a cutting blade at a desired goniogonal angle by setting an ingot member at a predetermined angle in advance and mounting it on a processing device.

Means for Solving the Problems The ingot member feeding device of the present invention includes a feeding mechanism for mounting the ingot member, and a support stand provided in the processing device, and the feeding mechanism includes a pedestal for completely fixing the ingot I material, and this pedestal. With a support base that supports the whole thing? The support base is provided with means for adjusting the support angle of the axis of the ingot member supported on the support base, and mounting means for attaching to the L support base, and the support base is provided with a means for attaching the support base to the support base. It is characterized in that a guide member attached at a predetermined angle to the cutting blade of the entire processing device serves as a guide member.

Embodiment FIG. 1 shows an ingot member feeding device of the present invention. The side view of an example applied to a cutting 1JfT machine as a processing device.

Figure @2 shows its front view 2.

The supply device 1 includes a supply mechanism 2 for attaching the ingot 8H material WTr, and a support stand 8 attached to the ingot member attachment mechanism 6 of the processing equipment @6.

The ingot member W is made of a semiconductor electronic material such as silicon, and an auxiliary piece made of ceramics or the like is adhered to the lower side over almost the entire length as shown in FIGS. 8 and 4. A slide base 8 is fixed with adhesive or the like.

The supply mechanism 2, as shown in FIGS. 8 and 4, includes a pedestal 10 that supports the ingot member W, that is, the slide base 8, and a pedestal 11 that supports the pedestal IQTh.

As shown in FIGS. 6 and 7, the pedestal 1G is formed with a fitting groove xz into which the slide base 8 is inserted. This fitting groove 12 is provided with a contact plate 18 that abuts one side of the slide base 8, and the entire contact plate 11 is pressed against the slide base 8 by screws 14 to fix the ingot member wB.

The support stand 11 is composed of a base IS and a rotating stand 16 mounted on the base 15, and is made by tilting the axis (crystal axis) of the ingot member W attached to the above-mentioned support stand 10 at a predetermined angle. Equipped with a fixed angle adjustment hand recess.

This angle adjustment means consists of a vertical movement means 17 and a horizontal rotation hand 1fQsa. One vertical movement means is a pedestal 10
and a shaft support 18 that supports the entire front end of the shaft.

It consists of a push-up member 19 such as a jack provided at the rear end of the rotating table 16 and a fixing part 20 fixed at a predetermined angle. The shaft support 18 includes a joint arm 21 that projects downward from the front of the pedestal 10', a support yoke 22 that projects from the front end Cζ of the rotating table 16, and a horizontal pin 28 that passes through these.
It consists of The fixing part 20 is adapted to rotate once with an adjustment arm 24 that protrudes toward the lower part C of the rear opening of the pedestal 10.
It consists of a fixed yoke z5 that protrudes from and holds the adjustment arm 24, and the fixed yoke 25 has an elongated hole 2 in the vertical direction.
6t-drilled, and the adjustment arm z4 has a screw rod 2 in the horizontal direction.
This screw rod z7 is passed through the elongated hole 26 and fixed with a tightening nut 28.

The horizontal rotation means 80 includes a shaft support 81 provided at the tip of each of the base 16 and the rotation table 16, and an adjustment portion s2 and a fixing portion 88 provided at the rear. Axial support Ill
is the support shaft R4f rotation table 16 installed at the front end of the base 16.
The adjusting part 82 is pivotably supported by a screw rod R6t on the rear side of the rotating base 16, and on one side of the base 16. Equipped with a support plate nr2 into which the screw rod 86 is inserted, nuts! 18.89 makes the screw rod 11g! - Move forward and backward to horizontally rotate the first rotation table 16 with the pivot support 81 as the entire center.

The fixed part s8 is attached to the base 16. Screw rod 40.4 installed in
The example in Figure 5 shows an example in which two sets of screw rods 40 and long holes 41 are provided. However, if the ingot member w is relatively short and lightweight, of course 1
It may be a group.

At the lower part of the base 16, there are formed four attachment means for attaching to the support pedestal 8.The wax attachment means 46 may be, for example, a dovetail groove, and the support pedestal 8 has a dovetail groove that fits into the attachment means. A structured guide member 411 is fully provided.

This guide member 46 is designed to accurately attach the supply member 2 at a predetermined angle, for example, at right angles to the cutting blade of the processing device 6.
0 is wound around 8 rollers Fila and 0 Filb 1C at a predetermined pitch, all of the many parallel wire rows are formed into one cutting blade 52, and the wire bG? This figure shows a wire-type cutting machine that runs at a suitable speed, cuts an ingot member w'ft, and forms a large number of wafers at the same time.

The above-mentioned ingot member mounting mechanism 6 is provided below the cutting blade 62, and this mounting mechanism 6 is an elevating means! i8jζ
Equipped with a lifting platform +54 that can be raised and lowered by
The support stand 3 is attached on top, and the guide member 46 is attached to the cutting blade 52.
Mounted at right angles to the

The supply mechanism 2 may be carried by an operator with both hands and attached to the support stand 8 of the processing device 5, but when the ingot member W is large and heavy, it is preferable to combine it with a conveyance truck.

FIG. 12 and FIG. 1s show one example.

The carrier 60 includes a carrier 63' similar to the support 8 above.
462 is provided on this conveyance table 61. As a result, the supply mechanism 2 is slidably mounted on the conveyance carriage 60 with the ingot member W attached thereto. The feeding mechanism 2 on the carrier 6q may be manually fed, or an appropriate feeding mechanism (not shown) such as hydraulic pressure may be provided. 68 in the figure is attached to the lower part of the carrier 60 A guide rail 64 guides the idle roller 68 in FIG. 2 for determining the position.

When setting the mounting angle 1 of the ingot member W mounted on the action pedestal 10, that is, the gonio angle, the ingot member W2 base tR (7) is moved as appropriate by the vertical movement means 1γ or the horizontal rotation means 30, or both. The angle is adjusted using the reference line preferably the center line of the mounting means 45, which is a @ groove, or a reference line parallel thereto. When making this adjustment, x
.

Transport it together with the transport vehicle to an axis measuring device using lines, etc., and measure the reference line? It is effective to measure the axis center and set the entire gonio angle as a reference.

After the setting of the goniogonal angle is completed, the supply mechanism 2 is carried by all the workers or transferred to the processing device 6 using the conveyance trolley GOD, and is placed on the support stand 8 on the mounting mechanism 6. The guide member 46 formed on this support base 8 is connected to the cutting blade 62 as described above.
The mounting means 46, ie, the dovetail groove, of the supply member 2 is positioned at right angles to the cutting blade 6z.

However, when the guide member 46 is not located perpendicular to the cutting blade 62 but is slightly inclined, and when setting the gonio angle, the line that should be the reference for the supply mechanism 2 and the axis of the attachment means 4g may be slightly deviated. These angles are known in advance and are of course corrected using correction values when setting the goniogonal angle.

Effects of the Invention According to the present invention, since the supply mechanism for fully mounting the ingot member is equipped with the angle adjustment means 2 that fully supports the axis of the ingot member, it is easy to set and measure the ingot member at a predetermined noconio angle. By setting the ingot at the required angle, waiting, and then supplying it to the machining device, the axis of the ingot member will be correctly positioned at the required goniogonal angle with respect to the cutting blade, so cutting operations can be started immediately. Effects such as being able to improve the processing efficiency of processing equipment, etc. 4 fF of the drawing! Fig. 1 is a side view showing the ingot member supply device of the present invention as a complete processing device, and Fig. 2 is its front view, @8
The figures and @4 figure relate to the supply mechanism.

Figure 8 is the front view, Figure 4 is the right side view, Figures S to 1 are related to the pedestal, Figure 6 is the front view, and Figure 9 is the front view of Figure 5. 7 is a sectional view taken along line Y-Y in FIG. 6, FIGS. 8 and 9 relate to the rotating table, FIG. 8 is a partially cutaway front view, and FIG. 9 is a sectional view taken along line Y-Y in FIG. 10 and 11 relate to the base, Figure 10 is a partially cutaway front view, Figure @11 is a plan view, and Figure 12 is a plan view of the base.
The figure and Fig. 18 show the feeding mechanism ft installed on the conveyor truck.
Fig. 12 is a front view, and Fig. 18 is a right side view.

1 is an ingot member supply device, 2 is a supply mechanism, 3 is a support stand, 5 is a processing device, 10 is a pedestal, 11 is a support stand, 45 is a mounting means, 46 is a guide member, 52 is a cutting blade, A is an angle The adjusting means W is an ingot member.

Patent applicant: Sumitomo Metal Industries, Ltd. Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 9 0 diagram Figure 12

Claims (1)

[Claims] It consists of a supply mechanism for attaching the ingot member and a support stand provided in the processing device for the ingot member. Means for adjusting the support angle of the axis of the ingot member supported on the pedestal and mounting means for attaching to the support pedestal are provided, and the mounting means is fitted to the support pedestal, and the feeding mechanism is connected to the cutting blade of the processing device. 1. An ingot member feeding device, characterized in that it is provided with a guide member that is attached at a predetermined angle.