JPS61121654U - - Google Patents

Info

Publication number
JPS61121654U
JPS61121654U JP529385U JP529385U JPS61121654U JP S61121654 U JPS61121654 U JP S61121654U JP 529385 U JP529385 U JP 529385U JP 529385 U JP529385 U JP 529385U JP S61121654 U JPS61121654 U JP S61121654U
Authority
JP
Japan
Prior art keywords
chamber
wafer
ion implantation
end station
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP529385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0612605Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985005293U priority Critical patent/JPH0612605Y2/ja
Publication of JPS61121654U publication Critical patent/JPS61121654U/ja
Application granted granted Critical
Publication of JPH0612605Y2 publication Critical patent/JPH0612605Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985005293U 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン Expired - Lifetime JPH0612605Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985005293U JPH0612605Y2 (ja) 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985005293U JPH0612605Y2 (ja) 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン

Publications (2)

Publication Number Publication Date
JPS61121654U true JPS61121654U (OSRAM) 1986-07-31
JPH0612605Y2 JPH0612605Y2 (ja) 1994-03-30

Family

ID=30481665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985005293U Expired - Lifetime JPH0612605Y2 (ja) 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン

Country Status (1)

Country Link
JP (1) JPH0612605Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0193043A (ja) * 1987-10-05 1989-04-12 Nissin Electric Co Ltd イオン処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792838A (en) * 1980-12-02 1982-06-09 Anelva Corp Cassette to cassette substrate process device
JPS58113256U (ja) * 1982-01-27 1983-08-02 日本電気ホームエレクトロニクス株式会社 半導体製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792838A (en) * 1980-12-02 1982-06-09 Anelva Corp Cassette to cassette substrate process device
JPS58113256U (ja) * 1982-01-27 1983-08-02 日本電気ホームエレクトロニクス株式会社 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0193043A (ja) * 1987-10-05 1989-04-12 Nissin Electric Co Ltd イオン処理装置

Also Published As

Publication number Publication date
JPH0612605Y2 (ja) 1994-03-30

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