JPS6111440B2 - - Google Patents

Info

Publication number
JPS6111440B2
JPS6111440B2 JP54013220A JP1322079A JPS6111440B2 JP S6111440 B2 JPS6111440 B2 JP S6111440B2 JP 54013220 A JP54013220 A JP 54013220A JP 1322079 A JP1322079 A JP 1322079A JP S6111440 B2 JPS6111440 B2 JP S6111440B2
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
beam line
line vacuum
evacuation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54013220A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55105999A (en
Inventor
Shoji Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1322079A priority Critical patent/JPS55105999A/ja
Publication of JPS55105999A publication Critical patent/JPS55105999A/ja
Publication of JPS6111440B2 publication Critical patent/JPS6111440B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1322079A 1979-02-09 1979-02-09 Neutral particle incident device Granted JPS55105999A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1322079A JPS55105999A (en) 1979-02-09 1979-02-09 Neutral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1322079A JPS55105999A (en) 1979-02-09 1979-02-09 Neutral particle incident device

Publications (2)

Publication Number Publication Date
JPS55105999A JPS55105999A (en) 1980-08-14
JPS6111440B2 true JPS6111440B2 (enExample) 1986-04-02

Family

ID=11827081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1322079A Granted JPS55105999A (en) 1979-02-09 1979-02-09 Neutral particle incident device

Country Status (1)

Country Link
JP (1) JPS55105999A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6095586B2 (ja) * 2013-01-25 2017-03-15 有限会社真空実験室 ゲッター部材収納具、ゲッター装置及びゲッターポンプ

Also Published As

Publication number Publication date
JPS55105999A (en) 1980-08-14

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