JPS61111251A - 平板状部材の保持装置 - Google Patents
平板状部材の保持装置Info
- Publication number
- JPS61111251A JPS61111251A JP22895584A JP22895584A JPS61111251A JP S61111251 A JPS61111251 A JP S61111251A JP 22895584 A JP22895584 A JP 22895584A JP 22895584 A JP22895584 A JP 22895584A JP S61111251 A JPS61111251 A JP S61111251A
- Authority
- JP
- Japan
- Prior art keywords
- held
- base plate
- suction
- substrate
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 16
- 230000001105 regulatory effect Effects 0.000 claims description 19
- 238000013459 approach Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 37
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H3/00—Separating articles from piles
- B65H3/08—Separating articles from piles using pneumatic force
- B65H3/14—Air blasts producing partial vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Manipulator (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22895584A JPS61111251A (ja) | 1984-11-01 | 1984-11-01 | 平板状部材の保持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22895584A JPS61111251A (ja) | 1984-11-01 | 1984-11-01 | 平板状部材の保持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61111251A true JPS61111251A (ja) | 1986-05-29 |
JPH0215461B2 JPH0215461B2 (enrdf_load_stackoverflow) | 1990-04-12 |
Family
ID=16884476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22895584A Granted JPS61111251A (ja) | 1984-11-01 | 1984-11-01 | 平板状部材の保持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61111251A (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS631647A (ja) * | 1986-06-23 | 1988-01-06 | Taiyo Tekko Kk | 無接触吸着装置 |
WO2011027546A1 (ja) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | 基板移載装置、および基板移載方法 |
JP2012253310A (ja) * | 2010-09-27 | 2012-12-20 | Toray Eng Co Ltd | 基板搬送装置 |
CN111348412A (zh) * | 2020-04-27 | 2020-06-30 | 聊城市博源节能科技有限公司 | 一种零部件取料装置 |
CN114104658A (zh) * | 2021-12-14 | 2022-03-01 | 常州先进制造技术研究所 | 一种板材上料自适应控制方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5140343A (en) * | 1974-09-25 | 1976-04-05 | Ota Toshuki | Aruminiumuno hyomenshoriho |
JPS5338291U (enrdf_load_stackoverflow) * | 1976-09-08 | 1978-04-04 | ||
JPS58143989A (ja) * | 1982-02-15 | 1983-08-26 | 株式会社日立製作所 | 搬送装置 |
-
1984
- 1984-11-01 JP JP22895584A patent/JPS61111251A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5140343A (en) * | 1974-09-25 | 1976-04-05 | Ota Toshuki | Aruminiumuno hyomenshoriho |
JPS5338291U (enrdf_load_stackoverflow) * | 1976-09-08 | 1978-04-04 | ||
JPS58143989A (ja) * | 1982-02-15 | 1983-08-26 | 株式会社日立製作所 | 搬送装置 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS631647A (ja) * | 1986-06-23 | 1988-01-06 | Taiyo Tekko Kk | 無接触吸着装置 |
WO2011027546A1 (ja) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | 基板移載装置、および基板移載方法 |
JP2011057314A (ja) * | 2009-09-07 | 2011-03-24 | Murata Machinery Ltd | 基板の移載装置、およびその方法 |
TWI490155B (zh) * | 2009-09-07 | 2015-07-01 | Murata Machinery Ltd | A substrate transfer device, and a substrate transfer method |
JP2012253310A (ja) * | 2010-09-27 | 2012-12-20 | Toray Eng Co Ltd | 基板搬送装置 |
CN111348412A (zh) * | 2020-04-27 | 2020-06-30 | 聊城市博源节能科技有限公司 | 一种零部件取料装置 |
CN114104658A (zh) * | 2021-12-14 | 2022-03-01 | 常州先进制造技术研究所 | 一种板材上料自适应控制方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0215461B2 (enrdf_load_stackoverflow) | 1990-04-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0201240B1 (en) | Apparatus for supporting and/or conveying a plate with fluid without physical contact | |
KR101296704B1 (ko) | 비접촉 반송 장치 | |
TWI665146B (zh) | 非接觸搬送裝置及非接觸吸著盤 | |
US8905680B2 (en) | Ultrathin wafer transport systems | |
KR102315301B1 (ko) | 반송 패드 및 웨이퍼의 반송 방법 | |
KR101187684B1 (ko) | 래디얼 플로우를 이용한 비접촉식 기판 척킹용 에어 패드 | |
JP2024026194A (ja) | ウエハ搬送装置 | |
JPS61111251A (ja) | 平板状部材の保持装置 | |
KR20170016276A (ko) | 기판 부상 반송 장치 | |
JPH0632916B2 (ja) | 流体によつて板状体を無接触状態で懸垂浮遊搬送させる方法 | |
JPH08330383A (ja) | 基板受渡し装置 | |
JPS6221237A (ja) | ウエハ位置決め用テ−ブル | |
US20190385890A1 (en) | Apparatus for supporting and maneuvering wafers | |
JP6172997B2 (ja) | 板状物の搬送装置 | |
JP4333879B2 (ja) | 非接触吸着治具及び非接触チャック装置 | |
JPH09107022A (ja) | 回転保持装置及び方法 | |
JPS6216924A (ja) | 流体によつて板状体を無接触状態で懸垂浮遊させる方法 | |
JPH02138044A (ja) | 板状体の保持装置 | |
JP2004196435A (ja) | 大型薄板状材の搬送方法及び装置 | |
CN217089559U (zh) | 盘纸纸粉清洁装置及卷烟机 | |
JPH01127538A (ja) | 板状物受け渡し装置 | |
TWI751347B (zh) | 刀片蓋 | |
JPH0745692A (ja) | 基板の吸着保持装置 | |
JPS63164236A (ja) | 板状物保持装置 | |
JPH05335404A (ja) | 無接触保持装置 |