JPS61106024U - - Google Patents

Info

Publication number
JPS61106024U
JPS61106024U JP19146484U JP19146484U JPS61106024U JP S61106024 U JPS61106024 U JP S61106024U JP 19146484 U JP19146484 U JP 19146484U JP 19146484 U JP19146484 U JP 19146484U JP S61106024 U JPS61106024 U JP S61106024U
Authority
JP
Japan
Prior art keywords
vacuum chamber
leak gas
manufacturing apparatus
semiconductor manufacturing
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19146484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19146484U priority Critical patent/JPS61106024U/ja
Publication of JPS61106024U publication Critical patent/JPS61106024U/ja
Pending legal-status Critical Current

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  • Pipeline Systems (AREA)
JP19146484U 1984-12-19 1984-12-19 Pending JPS61106024U (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19146484U JPS61106024U (el) 1984-12-19 1984-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19146484U JPS61106024U (el) 1984-12-19 1984-12-19

Publications (1)

Publication Number Publication Date
JPS61106024U true JPS61106024U (el) 1986-07-05

Family

ID=30748903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19146484U Pending JPS61106024U (el) 1984-12-19 1984-12-19

Country Status (1)

Country Link
JP (1) JPS61106024U (el)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111937A (ja) * 1986-10-28 1988-05-17 Ulvac Corp 真空処理装置用着脱自在可動式被処理物搬入・搬出装置
JPS63111936A (ja) * 1986-10-28 1988-05-17 Ulvac Corp 真空処理装置用着脱自在可動式被処理物搬入・搬出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4417881Y1 (el) * 1965-12-08 1969-08-02
JPS58156593A (ja) * 1982-03-10 1983-09-17 Nippon Telegr & Teleph Corp <Ntt> 気相エピタキシヤル成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4417881Y1 (el) * 1965-12-08 1969-08-02
JPS58156593A (ja) * 1982-03-10 1983-09-17 Nippon Telegr & Teleph Corp <Ntt> 気相エピタキシヤル成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111937A (ja) * 1986-10-28 1988-05-17 Ulvac Corp 真空処理装置用着脱自在可動式被処理物搬入・搬出装置
JPS63111936A (ja) * 1986-10-28 1988-05-17 Ulvac Corp 真空処理装置用着脱自在可動式被処理物搬入・搬出装置

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