JPS6176956U - - Google Patents
Info
- Publication number
- JPS6176956U JPS6176956U JP16281684U JP16281684U JPS6176956U JP S6176956 U JPS6176956 U JP S6176956U JP 16281684 U JP16281684 U JP 16281684U JP 16281684 U JP16281684 U JP 16281684U JP S6176956 U JPS6176956 U JP S6176956U
- Authority
- JP
- Japan
- Prior art keywords
- inlet
- flange
- flanges
- gas containing
- containing impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000012423 maintenance Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16281684U JPS6176956U (el) | 1984-10-27 | 1984-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16281684U JPS6176956U (el) | 1984-10-27 | 1984-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176956U true JPS6176956U (el) | 1986-05-23 |
Family
ID=30720690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16281684U Pending JPS6176956U (el) | 1984-10-27 | 1984-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176956U (el) |
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1984
- 1984-10-27 JP JP16281684U patent/JPS6176956U/ja active Pending