JPS6387289U - - Google Patents
Info
- Publication number
- JPS6387289U JPS6387289U JP18296186U JP18296186U JPS6387289U JP S6387289 U JPS6387289 U JP S6387289U JP 18296186 U JP18296186 U JP 18296186U JP 18296186 U JP18296186 U JP 18296186U JP S6387289 U JPS6387289 U JP S6387289U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- gas introduction
- introduction pipe
- inert gas
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296186U JPS6387289U (el) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296186U JPS6387289U (el) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6387289U true JPS6387289U (el) | 1988-06-07 |
Family
ID=31129250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18296186U Pending JPS6387289U (el) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6387289U (el) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0249978A (ja) * | 1988-08-12 | 1990-02-20 | Hitachi Ltd | 真空装置 |
-
1986
- 1986-11-28 JP JP18296186U patent/JPS6387289U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0249978A (ja) * | 1988-08-12 | 1990-02-20 | Hitachi Ltd | 真空装置 |