JPS61105771A - Magnetic recording and reproducing device - Google Patents

Abstract

PURPOSE:To improve the durability of the regulating board and the guide board by forming a boundary layer in which the content ratio of the metal element included in the primary coating layer uniformly decreases in the thickness-direction, which is provided between the primary coating layer of an essential metal element formed on the outer surface of the base material and the secondary layer of ceramic, both being the layers of a hard coating of the regulating board and the guide board. CONSTITUTION:A regulating board 16 and a guide board 17 that respectively regulates and guides a flexible rotary magnetic recording medium are provided in a manner that both are able to face to the recording medium as maintaining a specific interval between the medium and themselves. On the surfaces 18 and 19 of the regulating board 16 and/or the guide board 17 that face to the recording disc, a hard coating that consists of layers 47, 48, and 49 is formed. The layer 47 is made of a metal from groups III, IVa, Va, or VIa of the periodic table such as, for instance, Ti, and is formed directly on a base material of aluminum alloy or stainless steel. The layer 49 is made, for instance, of a ceramic that includes TiN. The boundary layer 48 includes Ti at such a ratio that decreases uniformly in its thickness direction from the layer 47 to the layer 49. In this way, crackings and peelings are prevented from occurring even if the environmental temperature drastically varies repeatedly.

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a magnetic recording and reproducing device for performing K recording and reproducing on a flexible rotating magnetic recording medium (hereinafter abbreviated as magnetic disk), and particularly to a magnetic recording and reproducing device for stably rotating the magnetic disk. Regarding improvements to the mechanism.

[Prior art]

2. Description of the Related Art In recent years, so-called electronic cameras have been put into practical use that record and reproduce image signals captured by an image sensor or the like on a small magnetic disk. Compared to conventional cameras that use silver film, the electronic cameras mentioned above have the advantage of being able to be erased and rewritten, and that images can be easily played back on a home television without the need for developing processes. It has its advantages.

In general, in magnetic recording and reproducing devices used in the above-mentioned city camera, etc., the guidance is not restricted by the gap between the regulation plate and the guide plate, which are provided so that they can face each other with a predetermined interval, so the motor drives the magnetic recording and reproducing device at high speed. It is configured so that a magnetic head is brought into stable contact with a rotationally driven magnetic disk, and recording and reproduction is performed using an electric circuit.

Conventionally, the regulating plate and the guide plate are made of metal such as stainless steel, so that the surface facing the magnetic disk has a good finish, and a thin air layer is formed between this surface and the magnetic disk. The magnetic disk was rotating stably.

However, when the rotational speed of the magnetic disk decreases, such as when the rotation starts or ends, an air layer is no longer formed between the magnetic disk and the magnetic disk. In this case, the magnetic disk comes into contact with the regulating plate and the guide plate, which causes scratches on the magnetic disk and shortens the life of the magnetic disk.

On the other hand, in order to solve this problem, a proposal has been made in Utility Model Application Publication No. 58-72758, Azusa et al., to provide a cushioning member such as a non-condensed cloth on the surface of the regulating plate and the guide plate facing the magnetic disk. Because the dimensions of futoni cloth vary greatly and the surface precision is poor, they are mostly used in a contact state. Therefore, the original effect of the regulating plate and the guide plate, that is, forming an air layer and stably guiding and regulating the magnetic disk, can be achieved without weaving, and the life of the non-woven fabric is also shortened, making it impractical.

In order to solve the above problem, the present inventors have previously proposed an apparatus configured as follows. That is, in a magnetic recording and reproducing apparatus in which a magnetic disk is guided and regulated by a gap between a regulating plate and a guide plate, which are provided so as to face each other with a predetermined interval, At least on the surface facing the magnetic disk, the or group of the periodic table, the IV a group, the V
A hard coating layer of a carbide, nitride, or carbonitride of a group A or Vla group metal is formed.

However, when a hard coating layer as described above is formed on the regulating plate or guide plate made of aluminum alloy or stainless steel, which is usually applied to this type of device, the durability (weather resistance) of this hard coating layer is When a heat cycle test was conducted to investigate the properties of the coating, it was found that the coating easily cracked and the coating peeled off from these areas.

〔the purpose〕

The present invention has been made to solve the problem of slanting, and the hard coating layer formed on at least the surface facing the magnetic disk of the regulating plate and/or guide plate in the magnetic recording/reproducing device is environmentally friendly. The purpose is to provide this type of device that has excellent durability (weather resistance) and does not crack or peel even if the temperature repeatedly changes suddenly.

[Overview]

In order to achieve the above object, the present invention is characterized by the following configuration. That is, it has a regulating plate and a guide plate that are provided so as to face each other with a predetermined distance therebetween, and guide and regulate the flexible rotary magnetic recording medium by the gap between the regulating plate and the guide plate. In the magnetic recording/reproducing device, in which a hard coating layer is formed on at least the surface of the regulation plate and/or guide plate facing the magnetic recording medium, the hard coating layer is particularly formed on the regulation plate and/or the guide plate. Or ■ of the periodic table formed on the surface of the base material of the guide plate.
a tenth first layer made of a metal of group I, group IV a, group v3, or group Vla; a boundary layer formed on this first layer; and the first layer formed on this boundary layer. and a second layer made of ceramics containing the metal element in the first layer as a component, and the boundary layer contains the metal element in the first layer as a component and the gold M
The N content varies depending on the position in the thickness direction of this boundary layer.
It changes so that it decreases almost monotonically from the layer side toward the second layer side.

〔Example〕

1 and 2 are diagrams showing the configuration of an embodiment of the present invention, in which FIG. 1 is a schematic sectional view and FIG. 2 is a line A-A in FIG. 1.
FIG.

In FIGS. 1 and 2, a magnetic disk 1 is chucked onto a rotating shaft 4 of a disk drive motor 3 mounted on a base 2, and is held in a jacket 5. As shown in FIG. The magnetic disk 1 also has a guide shaft 6.
．． A magnetic head 8 supported by the feed screw 7 via a holding base 8a is in contact with it. The guide shaft 6 passes through the guide hole of the magnetic head 8, and both ends thereof are fixed to the base body 2. In other words, the magnetic head 8 is slidable in the longitudinal direction of the guide shaft 6. Further, one end of the feed screw 7 is rotatably supported by the base body 2, and the other end is directly connected to the saw shaft 10 of the stepping motor 9 for head feeding.

The presser arm 11 is rotatably supported by a support i11+13 with respect to a member 12 fixed on the base body 2.

A tension spring 1 is provided between the presser arm 11 and the member 12.
4 is applied to rotate the presser arm 11 counterclockwise about the support shaft 13. t [The presser arm 11, which is rotated and energized, comes into contact with the column 15 which is erected on the base body 2 at its tip, so that its position is maintained. Further, the upper holding arm 11 holds the jacket 5 in place, and also holds the regulating plate 16 at a position facing the magnetic head 8. On the other hand, a guide plate 17 is provided on the base 2 so as to surround the magnetic head 8. In this embodiment, the material of the base material of the regulation plate 16 and the guide plate 17 is an aluminum alloy (JI8NO, A2219
) or stainless steel (SUS304). At least surfaces 18 and 1 of the base material of the regulating plate 16 and/or the guide plate 17 that face the magnetic disk 1
Hard coatings f@81 and 82 are formed on each of the hard coatings f@81 and 82, respectively.

FIG. 3 shows at least the surfaces 18 and 1 of the regulating plate 16 or guide plate 17 facing the magnetic disk 1 in FIG.
FIG. 4 is an enlarged view showing the structure of a hard coating layer 81 or 82 formed in FIG. 9, and FIG. 4 is an enlarged view showing a special case of the hard coating layer in FIG. 3. 47 in FIGS. 3 and 4 is an IK liquid type tl on the base material (that is, aluminum alloy or stainless steel as the base material of the regulating plate 16 or guide plate 17).

Titanium (Ti) layer as the first layer, 48°48
' is a boundary layer formed on the first layer, 49 is a second layer made of ceramics and 12 is formed on the boundary layer 48.
This is a titanium nitride (TiN) layer.

In FIG. 3, the thickness of the Ti layer 47 is 0.4 μm.

The thickness of the boundary layer 48 is 0.1 μm, the thickness of the TiN layer 49 is 0.5 μm, and in FIG. is 0
．． It is 4 μm. The boundary layer 48 is a substance called Ti(1-x)Nx which contains the metal element Ti as a component in the first layer 47, and the content of Ti is ! The value of (+-x) varies depending on the position of the boundary layer 48 in the thickness direction of the first layer 47 (Ti).
It has a structure in which the pitch decreases approximately from the side toward the second ring 49 (TiN) side. Particularly in the example shown in FIG. 4, the boundary layer 48' consists essentially only of Ti in the portion in contact with the base material (16 or 17) and its vicinity, and gradually increases toward the second layer 49. The Ti content (l-x) is decreasing. That is, the boundary layer 48' in FIG. 4 has a property that includes both the first @(TiI) and the boundary layer in FIG. 3, but the distinction between the two is unclear. In addition to physical vapor deposition methods (hereinafter referred to as PVD method) such as the hard reactable ion blating method as described above, chemical vapor deposition methods such as optical OVD method (hereinafter referred to as OVD method) can be considered. However, in this example, considering that the base material is made of an aluminum alloy, the hard coating layer was formed by the reactive ion blasting method among the PVD methods. In general, the temperature of the base material during coating becomes high, and the heat i between the hard coating 11i and the base material increases during cooling after coating.
Cracks may occur in the coating layer due to the difference in tensile modulus. Particularly in the OVD method, the base material temperature during coating must be at least 700°0, but in the case of aluminum alloys, if the temperature exceeds 30,000, the base material will be deformed because it has the property of causing thermal deformation. . On the other hand, in the reactive ion blating method, what is the base material during coating? ! i1 degree to 200°01. It is possible to coat the coating with less than that, and it is also desirable from the viewpoint of the strength, properties, productivity, etc. of the coating.

FIG. 5 is a schematic diagram showing the configuration of an ion blating device that performs the above-mentioned reactive ion blating. In the figure, reference numeral 51 indicates a bell jar, and within this bell jar 51, a sample mount 53 on which a sample 52 is mounted in a skewer shape is connected to a motor 54.
A rotation mechanism operated by the power of 1 rotates in the direction of arrow 53a in the figure and revolves in the direction of arrow 53b in the figure. In addition, the sample mounting table 53 is connected to the base voltage power source 5.
A negative voltage is applied by sample 5.
2 is negatively charged. In the figure, reference numeral 56 denotes an evaporation source containing Ti, and rll i is evaporated by applying a beam from a beam device 57 as shown by the arrow.

Further, above the evaporation source 56, there is provided an ionization electrode 59 to which a voltage of +EO'' is applied by an ionization power source 58, and the space between the evaporation source 56 and the ionization electrode 58 is brought into a plasma state by this electrode 59. The evaporated Ti is ionized. The ionized Ti is accelerated toward the sample mount 53 and collides with the sample 52 with high kinetic energy, forming a Ti layer.
If N2 gas is introduced as a reaction gas from 0, N2
The gas becomes a plasma state and is accelerated toward the sample mount 53 to form the sample 52vCTiN layer.

,・For cases in which a TiN layer is formed after forming a Ti layer, the ionization power source is 40V and the substrate voltage is 3V when forming a Ti layer.
00■, and when the TiN layer is used, the ionization power source is 40■,
The base voltage is assumed to be 100■.

The inventors applied T to stainless steel (SUS304) plates under various conditions using the ion blating device described above.
An i-layer and a TiN layer were formed, and the adhesion of the films was examined by a heat cycle test. This heat cycle test is a test method in which a basket containing a sample is moved back and forth between a tank kept at a high temperature and a tank kept at a low temperature to examine changes in the sample. The test was repeated for 500 cycles between 70°0 and 20 minutes per cycle.

FIG. 6 is a condition graph of the surface state in the first example.

In this example, a Ti layer is formed on the surface of the drum 22, and a TiN layer is formed immediately above the Ti layer. That is, there is no boundary layer 48 in FIG. 3 at all. In other words, the Ti layer 47 has a thickness of 0.4 μm, and the Ti layer 47 has a thickness of 0.4 μm.
Four N layers with a thickness of 9° and 5 μm are formed. When a film in such a state was formed, cracks were generated on the drum surface and the film was partially peeled off. The cracks damage the magnetic recording medium, resulting in deterioration of image quality. Therefore, an optimal film cannot be obtained under the conditions shown in FIG.

FIG. 7 is a diagram showing a condition graph of the surface state of the second example. In this case, the structure of the hard coating layer is as shown in FIG. In other words, a Ti layer 47 with a thickness of 004 μm is formed on the surface of the base material, a B layer, that is, a boundary layer 48 is coated with a thickness of 001 μm, and an 'I'iNI vehicle 49 is further coated with a thickness of 0.5 μm on top of the Ti layer 47.
It is formed in μm.

Further, at the boundary r@48, the Ti content rate changes continuously. When a film in such a state is formed, = 12
− No cranking occurs on the surface, and problems such as peeling do not occur.

FIG. 8 is a condition graph of the surface state of the third example.

In this case, the surface state is as shown in FIG. 3 as in the second example, but the Ti content in the B layer, that is, the boundary layer 48, changes stepwise. Even when a film is formed in this state, no cracks occur and a high-quality surface is obtained.

FIG. 9 is a diagram showing a condition graph of the surface state of the fourth example. The surface condition in this case is as shown in FIG. That is, a small amount of TI is present only in the vicinity of the base material, and the amount of T1 is continuously changed to form four TiN layers. Even when a film in such a state is formed, no cracks occur, a high quality film is obtained, and the surface condition is good.

FIG. 10 is a condition graph of the surface state of the fifth example. In this case as well, the surface condition is as shown in FIG. That is, even in such a film in which N2 gas is introduced from the beginning and the Ti content is changed in nine steps over four TiN layers, no cracks occur and the surface condition is good.

FIGS. 1I and 12 show condition 7 when the Ti content is varied. In Fig. 11, first set the degree of vacuum to IXI O-"1.'o r r, then apply N2
will introduce the system. Then, the amount of N2 gas introduced was gradually increased over about 10 minutes, and the degree of vacuum was increased to 4X 10"'.
It is continuously changed up to T o r r.

In Fig. 12, the amount of N2 gas introduced is increased stepwise to reduce the degree of vacuum to 0, '5X1.0-' Tor
r for 2 minutes, lXl0-4Torr for 2 minutes, 2×1
0-"[' n r r for 2 minutes, 3 x 10-' Tor
After setting r for 2 minutes and 4X10-4'i'or r for 2 minutes, 5X10-"I"or r was set.

In this way, a simple structure in which the Ti content is purpled continuously or discontinuously creates a high-quality hard coating that does not cause surface cracks or peeling even when the environmental temperature changes repeatedly and suddenly. You can get layers.

Note that the present invention is not limited to the above embodiments. For example, in this example, the film was formed by reactive ion blasting, but reactive sputtering may also be used. Also, using nitrogen gas as the reaction gas,
Although a titanium nitride layer is formed, titanium oxide may be formed by introducing acetylene gas and introducing titanium carbide or oxygen gas. In addition to titanium, other metal elements include In group, ■ group, +V a group, and V group of the periodic table.
Elements from group a and group IVIa can be used.

〔Effect of the invention〕

A boundary layer formed so that the content of the metal element changes in the thickness direction between a small layer of guide plates and/or regulation plates for guiding and regulating a magnetic recording medium in a magnetic recording and reproducing device. Since the hard coating layer is set to 15-, the hard coating layer is less likely to crack or peel off compared to conventional ones even if the environmental temperature repeatedly changes suddenly.

[Brief explanation of the drawing]

1 and 2 are diagrams showing the configuration of an embodiment of the present invention, in which FIG. 1 is a schematic sectional view, FIG. 2 is a sectional view taken along line AA in FIG. 1, and FIGS. 3 and 4. is a cross-sectional view of the hard coating layer in the same example, FIG. 5 is a schematic explanatory diagram of the reactive ion plating apparatus, FIGS. 6 to 10 are diagrams showing changes in the titanium content, and FIGS. FIG. 12 is a diagram showing changes in the degree of vacuum. DESCRIPTION OF SYMBOLS 1... Magnetic disk, 2... Base, 3... Disk drive motor, 5... Jacket, 6... Guide shaft, 7... Feed screw, 8... Magnetic head, 9...・・Stetsu pin motor □-ta, 1】・・・Presser arm, 16・・
- Regulation plate, 17... Guide plate, 81.82... Hard coating layer, 47... Ti layer, 48... Boundary layer, 49...
-TiN layer, 51...chamber, 52...sample, 5
3... Sample mounting stand, 54... Rotating mechanism, 55...
Base voltage power supply, 56... Evaporation source, 57... Beam device, 58... Ionization power supply, 59... Ion magnetic pole, 60... Gas system. 1 parable - Kuchiya Hiroshi - i: Nyohiro l -

Claims (1)

[Claims] (1) A regulation plate and a guide plate are provided to face each other with a predetermined interval maintained, and a flexible rotary magnetic recording medium is guided and regulated by the gap between the regulation plate and the guide plate. In the magnetic recording/reproducing device, the hard coating layer is formed on at least the surface of the regulation plate and/or the guide plate facing the magnetic recording medium, and the hard coating layer is formed on the regulation plate and/or the guide plate. A first layer made of a metal from group III, IVa, Va or VIa of the periodic table formed on the surface of the base material of the plate; a boundary layer formed on this first layer; a second layer made of ceramics formed on the boundary layer and containing the metal element in the first layer as a component; and the boundary layer contains the metal element in the first layer as a component and contains the metal. Magnetic recording and reproducing characterized in that the content rate changes so as to decrease almost monotonically from the first layer side to the second layer side according to the position in the thickness direction of the boundary layer. Device.