JPS61104633A - 半導体表面の帯電電荷量測定方法 - Google Patents
半導体表面の帯電電荷量測定方法Info
- Publication number
- JPS61104633A JPS61104633A JP22584584A JP22584584A JPS61104633A JP S61104633 A JPS61104633 A JP S61104633A JP 22584584 A JP22584584 A JP 22584584A JP 22584584 A JP22584584 A JP 22584584A JP S61104633 A JPS61104633 A JP S61104633A
- Authority
- JP
- Japan
- Prior art keywords
- gate
- wafer
- area
- electrode
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 39
- 238000005259 measurement Methods 0.000 title abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 230000006378 damage Effects 0.000 claims description 8
- 230000015556 catabolic process Effects 0.000 abstract description 12
- 238000009413 insulation Methods 0.000 abstract description 12
- 239000007769 metal material Substances 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 28
- 239000000523 sample Substances 0.000 description 23
- 230000001681 protective effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22584584A JPS61104633A (ja) | 1984-10-29 | 1984-10-29 | 半導体表面の帯電電荷量測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22584584A JPS61104633A (ja) | 1984-10-29 | 1984-10-29 | 半導体表面の帯電電荷量測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61104633A true JPS61104633A (ja) | 1986-05-22 |
| JPH036661B2 JPH036661B2 (enrdf_load_stackoverflow) | 1991-01-30 |
Family
ID=16835729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22584584A Granted JPS61104633A (ja) | 1984-10-29 | 1984-10-29 | 半導体表面の帯電電荷量測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61104633A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152140A (ja) * | 1986-12-17 | 1988-06-24 | Hitachi Ltd | 半導体集積回路装置 |
| JPH03270044A (ja) * | 1990-03-19 | 1991-12-02 | Sharp Corp | 半導体装置の検査方法 |
| JPH0450674A (ja) * | 1990-06-12 | 1992-02-19 | Toshiba Corp | 絶縁破壊評価用試験素子 |
| JPH0817884A (ja) * | 1994-06-27 | 1996-01-19 | Nec Corp | 半導体装置およびその測定方法 |
-
1984
- 1984-10-29 JP JP22584584A patent/JPS61104633A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152140A (ja) * | 1986-12-17 | 1988-06-24 | Hitachi Ltd | 半導体集積回路装置 |
| JPH03270044A (ja) * | 1990-03-19 | 1991-12-02 | Sharp Corp | 半導体装置の検査方法 |
| JPH0450674A (ja) * | 1990-06-12 | 1992-02-19 | Toshiba Corp | 絶縁破壊評価用試験素子 |
| JPH0817884A (ja) * | 1994-06-27 | 1996-01-19 | Nec Corp | 半導体装置およびその測定方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH036661B2 (enrdf_load_stackoverflow) | 1991-01-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |