JPS6110164Y2 - - Google Patents
Info
- Publication number
- JPS6110164Y2 JPS6110164Y2 JP1977020414U JP2041477U JPS6110164Y2 JP S6110164 Y2 JPS6110164 Y2 JP S6110164Y2 JP 1977020414 U JP1977020414 U JP 1977020414U JP 2041477 U JP2041477 U JP 2041477U JP S6110164 Y2 JPS6110164 Y2 JP S6110164Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light spot
- optical system
- surface accuracy
- test object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000007689 inspection Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977020414U JPS6110164Y2 (fr) | 1977-02-22 | 1977-02-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977020414U JPS6110164Y2 (fr) | 1977-02-22 | 1977-02-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53115050U JPS53115050U (fr) | 1978-09-13 |
JPS6110164Y2 true JPS6110164Y2 (fr) | 1986-04-02 |
Family
ID=28851347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1977020414U Expired JPS6110164Y2 (fr) | 1977-02-22 | 1977-02-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6110164Y2 (fr) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034851A (fr) * | 1973-07-31 | 1975-04-03 |
-
1977
- 1977-02-22 JP JP1977020414U patent/JPS6110164Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034851A (fr) * | 1973-07-31 | 1975-04-03 |
Also Published As
Publication number | Publication date |
---|---|
JPS53115050U (fr) | 1978-09-13 |
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