JPS61100873U - - Google Patents
Info
- Publication number
- JPS61100873U JPS61100873U JP18706584U JP18706584U JPS61100873U JP S61100873 U JPS61100873 U JP S61100873U JP 18706584 U JP18706584 U JP 18706584U JP 18706584 U JP18706584 U JP 18706584U JP S61100873 U JPS61100873 U JP S61100873U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- electrode system
- beam extraction
- slit
- drive mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims 2
- 239000000284 extract Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18706584U JPS61100873U (enExample) | 1984-12-10 | 1984-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18706584U JPS61100873U (enExample) | 1984-12-10 | 1984-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61100873U true JPS61100873U (enExample) | 1986-06-27 |
Family
ID=30744533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18706584U Pending JPS61100873U (enExample) | 1984-12-10 | 1984-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61100873U (enExample) |
-
1984
- 1984-12-10 JP JP18706584U patent/JPS61100873U/ja active Pending