JPS6185852U - - Google Patents

Info

Publication number
JPS6185852U
JPS6185852U JP1984171789U JP17178984U JPS6185852U JP S6185852 U JPS6185852 U JP S6185852U JP 1984171789 U JP1984171789 U JP 1984171789U JP 17178984 U JP17178984 U JP 17178984U JP S6185852 U JPS6185852 U JP S6185852U
Authority
JP
Japan
Prior art keywords
charged particle
repair device
particle irradiation
mask
mask repair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984171789U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638901Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984171789U priority Critical patent/JPS638901Y2/ja
Priority to EP85903053A priority patent/EP0221184B1/en
Priority to PCT/JP1985/000349 priority patent/WO1986000426A1/ja
Priority to DE8585903053T priority patent/DE3579236D1/de
Publication of JPS6185852U publication Critical patent/JPS6185852U/ja
Application granted granted Critical
Publication of JPS638901Y2 publication Critical patent/JPS638901Y2/ja
Priority to US07/227,469 priority patent/US4930439A/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984171789U 1984-06-26 1984-11-13 Expired JPS638901Y2 (enExample)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1984171789U JPS638901Y2 (enExample) 1984-11-13 1984-11-13
EP85903053A EP0221184B1 (en) 1984-06-26 1985-06-21 Mask repairing apparatus
PCT/JP1985/000349 WO1986000426A1 (fr) 1984-06-26 1985-06-21 Dispositif de reparation de masques
DE8585903053T DE3579236D1 (de) 1984-06-26 1985-06-21 Reparatur von masken.
US07/227,469 US4930439A (en) 1984-06-26 1988-08-02 Mask-repairing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984171789U JPS638901Y2 (enExample) 1984-11-13 1984-11-13

Publications (2)

Publication Number Publication Date
JPS6185852U true JPS6185852U (enExample) 1986-06-05
JPS638901Y2 JPS638901Y2 (enExample) 1988-03-16

Family

ID=30729469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984171789U Expired JPS638901Y2 (enExample) 1984-06-26 1984-11-13

Country Status (1)

Country Link
JP (1) JPS638901Y2 (enExample)

Also Published As

Publication number Publication date
JPS638901Y2 (enExample) 1988-03-16

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