JPH01155252U - - Google Patents
Info
- Publication number
- JPH01155252U JPH01155252U JP5100788U JP5100788U JPH01155252U JP H01155252 U JPH01155252 U JP H01155252U JP 5100788 U JP5100788 U JP 5100788U JP 5100788 U JP5100788 U JP 5100788U JP H01155252 U JPH01155252 U JP H01155252U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- analysis
- slit
- entrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5100788U JPH01155252U (enExample) | 1988-04-15 | 1988-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5100788U JPH01155252U (enExample) | 1988-04-15 | 1988-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01155252U true JPH01155252U (enExample) | 1989-10-25 |
Family
ID=31277036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5100788U Pending JPH01155252U (enExample) | 1988-04-15 | 1988-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01155252U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2525384A3 (en) * | 2011-05-19 | 2013-08-28 | FEI Company | Method and structure for controlling magnetic field distributions in an ExB wien filter |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62243231A (ja) * | 1986-04-15 | 1987-10-23 | Mitsubishi Electric Corp | 半導体製造装置 |
| JPS62272437A (ja) * | 1986-05-21 | 1987-11-26 | Mitsubishi Electric Corp | イオン注入装置用質量分析装置 |
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1988
- 1988-04-15 JP JP5100788U patent/JPH01155252U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62243231A (ja) * | 1986-04-15 | 1987-10-23 | Mitsubishi Electric Corp | 半導体製造装置 |
| JPS62272437A (ja) * | 1986-05-21 | 1987-11-26 | Mitsubishi Electric Corp | イオン注入装置用質量分析装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2525384A3 (en) * | 2011-05-19 | 2013-08-28 | FEI Company | Method and structure for controlling magnetic field distributions in an ExB wien filter |