JPS6095840A - Plasma x-ray generation device - Google Patents

Abstract

PURPOSE:To control the timing between gas injection and main discharge with good reproductivity by applying voltage between fixed and moving electrodes in which a semiconductive dielectric is provided on the opposed surface and absorbing the moving electrode in the fixed electrode and then opening a gas injection valve. CONSTITUTION:The vacuum exhaust in a chamber 5 is performed by closing a switch S2 and opening a switch S1 and making a moving electrode 8 adhere to a semiconductive dielectric 2. Subsequently, for example, the gas in a gas storage chamber 6 supplied from a gas bomb through a supply port 10 is injected into a chamber 5 from a permeation hole 14 and a gas injection port 11 by closing the switch S1 and opening the switch S2 and then the moving electrode 8. Then after the switch S2 is closed, the switch S1 is opened, the permeation hole 14 is clogged, and properly preset delay time elaspses, discharge is performed by applying high voltage HV between electrodes 3 and 4 by closing the switch S3 and X rays are geneerated by putting injection gas into plasma. Since the gas injection valve operation is performed by electrostatic force, the response speed of the valve opening and closing is fast. As a result, the time required for the opening and closing and the delay time until discharge can be controlled with good reproductivity.

Description

DETAILED DESCRIPTION OF THE INVENTION (11 Techniques of the invention, 1-force Stipe plasma X-ray generator, 11 r
Shiku t,l! +,', 1 degree of the sky -f-Yanha・', the scum that supplies the scum ``I14), so it is il+.

(2) Background of the technology In recent years, with the trend toward 1/8 integration in semiconductor integrated circuits, the formation of microscopic patterns in semiconductor devices is being carried out. In Mt't pre-ordering for forming C fine 8111 patterns, we use X-rays with a shorter wavelength than conventional ultraviolet rays, and the saw force is 1;4! Pattern formation can be performed with high precision.

A gas-type plasma X-ray generator, which is one of the X-ray sources, converts gas injected into an empty chamber into plasma by radiation, and supplies X-rays emitted from the plasma.8
! In such a device, the means for injecting the gas and the timing of the gas injection and the main discharge are important factors.

(:u iitNext Technological Problem 1MeLMizorasma However, this type of Harz odor (has a 11-day difference in the time it takes to open and close the valve and the time it takes for the current to be applied to 61°C and the valve to open). However, there was a problem in that the timing between dregs injection and discharge could not be determined.

(4) Purpose of the Invention The present invention aims to provide a plasma X-ray generator that can effectively control the timing between the injection of dregs into a vacuum chamber and the main formation 7Ii (14).
The target is

(5) Structure of the invention According to the present invention, the Nostype Zolasma X-ray generator 4L device iI+j = C cass 11j' connects the storage strain and the direct air chamber with the Kasmet valve. The lJJ motion 'ili 44λ that stops the valve in question, and the i
1. A fixed electrode 81' disposed opposite to the moving electrode and having a conductive dielectric material on the opposite surface, A3 and the above-mentioned iIJ electrode for applying a voltage between the moving electrode and the fixed electrode. It consists of a fixed electrode and an i + J moving city 4I by voltage application J stage.
Apply a heavy load between rg L7, i + J, and suck it into the fixed vehicle 19 people, - C scum injection valve open, and sludge l
Puchsma X-ray emission with 'L sky-y-middle nhahe li large configuration and l here as 'i'rlj5]1. 1J of equipment
For every t supply''・1''i1, 1,- is achieved, and I',
N7 rest city full, i no, j serious condition 4j IIJ・11
The saw fixed electrode A+ is installed at 4 degrees opposite the JJ'llI frame.
11 is arranged to apply electric current between the fixed electrodes and the i+J moving electrodes, and the corresponding
:11 Apply RA pressure by cutting stage, second, 1, step I
IJ electrodynamics (・Hold the electrode through the springs, hold the electrode through the spring, and make the A 0 ring is installed in the part, and the movable electrode is set to 0 by the above spring.
The gas injection valve can be stopped by crimping it to the ring, or the iiJ electrodynamic 44 can be formed from a θ-numbered body, and the electromagnet C disposed around the pj electrodynamic electrode gas L) and the human hull can be used. This is achieved by providing a plasma X-ray generator characterized in that the valve is sealed each time it is sucked. : (6) Embodiments of the invention □ Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a cross-sectional view of the main parts of a plasma It consists of a chamber 5 and discharge electrodes 3 and 4.

The gas injection valve I2 is connected by an insulating column [3
Two disc-shaped electrodes 7 and 9 are fixed to J, supported by a pillar 13, and a disc-shaped electrode Tli J that moves in the direction of this pillar J:
'Ii8 (For illustration purposes, the middle position jf) and the two semiconductive U'4 city electric lights provided on the opposing surfaces of the fixed electrodes 7 and 9, respectively. Body number 2
Wiring is provided between the three disc-shaped electrodes 7, 8 and 9 so that a voltage can be applied by the commercial pig iron 13 via the switch Sl or S2.

Then, a gas passageway 14 is provided to pass gas through the electrode 9 and the semiconductor 71i located above the dregs injection 1 into the vacuum chamber 5.

When the force of such a configuration is injected into I2 (for example, switch 7 is opened, switch S2 is closed and ζrti pole) (and tllI is applied between I- and 9), Jol+n5en-Ral+bek)
As a result, an attractive force due to electrostatic force acts between these electrodes, and i
+J motion'Ichigoku 8 is fixed? , 1i4449 and close to the semiconductive aA electric body 2. At the same time, open switch S2 and close switch S1.
! When the IJ electrode is depleted (applying a voltage of 11 between
Dynamic 'C' rA 11 C, f Fixed ' There is suction on the electrode 7, ',! di ('L 6' densely attached to di-substance I.

1-1 The response of switch 7, switch 7, and switch S2 to opening and closing due to the opening and closing of switch 7 and S2 is extremely small compared to conventional valves.

Next, to explain the operation of the J plasma x warp generator using the above-mentioned waste injection valve 2, first close the switch S2, open the switch S1, and bring the movable electrode 8 into close contact with the semiconductive electric body 2. , the chamber 5 is evacuated. Next, close switch S1 and open switch S2 to obtain μJ ”J'JJ
Electric 4! ! ij 8 as a semiconducting dielectric I1. For example, the waste in the waste storage chamber 6 supplied from the gas supply 1 through the gas supply port 1 to the gas supply port 1 is placed in close contact with the
1 into the chamber 5. Next, switch S2 is closed, switch si is opened, and the through hole 14 is filled with oil. It turns the gas into Pfusuma and emits X-rays.

By the way, -1-: Since the operation of the waste injection valve described above is based on electrostatic force, the response speed of Harz opening and closing is fast, and as a result, the time required for opening and closing and the delay time until discharge are reduced.
It can be controlled well. What! 3 Used for X-ray emission 41-1
゜Nokokasu was impressed by Toka when he saw the diagram of the device.

Figure 2: 1 Required Zolasma X-ray generator for explaining the second embodiment of the present invention. (Code 25 Let some of them be small ↓
2 (3 is the waste storage room, 28 is for waste injection, 1.29 is waste! 1j! Waste supply to the storage room 26)
shows.

The gas injection valve 20 provided in the gas storage chamber 26 is
Fixed electrode 22 with semiconducting I11 dielectric 2
(1 post 30 with 27 springs (lol) I + J + 71
The X-pole 23 is configured. The movable electrode 23 is a vacuum nayanha 25
The shape has a convex part 23J] that enters the concave part 41 where the waste injection port 2)3 is provided, and the convex part 23A is arranged around the gas injection part 2B by the force of the high 27. O
Hit the link 24 and get the vacuum 1. J Stop. , B
In order to inject the scum into the empty Nayanha 25, the movable electrode 23 is attracted to the fixed electrode 22 side by closing the switch S4 and applying an electric current between the electrodes 22 and 23.
Open B.

Then, when switch S4 is opened 14 times, it becomes 111! ls+71
The X pole 23 injects 1128 by the force of the spring 270.

Second dog example 6 explained above. Nioi (J) Achieved a fast J1 degree as in the first example.

Next, the third embodiment of the present invention will be described.
jjjj l, (I explain.

Figure 3 is creepy! × 1 device, 11 parts, 1 unit]
Top view (, chamber, 37 is gas lL person 1.38 is waste supply 1
'', and 1', 17j, and 4Q indicate gas injection valves according to this embodiment.

The waste injection valve 40 is held by an insulating column 39, and is formed of a magnetic material that seals the fixed electrode 32, the semiconductive d-shaped body 3I which is attached to the fixed electrode 32, and the gas injection valve 137. The structure consists of an electromagnetic Ishikawa coil 34 that pulls the aJ moving electrode 33 and the moving electrode $3.

When F-Osuisochi S6 is opened in the gas injection valve 40 having a force-pull configuration, and water lily S5 is closed, ijJ
Dynamic electrode electrode 33: Gas injected by being attracted to the 1-il 34
” 37 is sealed. Conversely, when the switch S6 is closed and the switch S5 is opened, the i'iJ moving electrode 33 is attracted to the fixed electrode 32 and adsorbed to the semi-7D conductive A3'l electric body 31.

1g14: In the example, “2 is possible, l1lj, electrode 33
Due to opening and closing series 1, 41 people lost 1'-! Gas is injected into the direct air Nayanha 35 from '37 and inserted with full force. In addition, it is also possible to synchronize the opening of 9 switches S5 and S6 and perform □"ζ, thereby reducing the amount of damage and % IJ.
3←It is like opening and closing in a more circular manner. '' □ By the way, the waste injection valve according to the present invention can be used not only in the Bu) SM X-ray emission device, but also in the Haku equipment i'+: where timing for two people is important. .

(7) Effects of the invention J:: R'f As explained in detail, is the invention a positive mass ray generator? ) In 1, the timing control of the dregs injection into the vacuum chamber and the main discharge can be controlled with good reproducibility, so it is useful for providing a constantly stable plasma X-ray source.

[Brief explanation of the drawing]

, FIG. 1, FIG. 2, and FIG. 3 show an embodiment of the present invention.
(There is. s, 2.21.31 semiconducting, ipu7h body, 3,
4 air'Ichikawa 11I'ha, 5 + 25+ J5 true 91
'-10 Yanha, G, 26.36 Kass! 11' Kuramuro,
7. ! 1.22.32 fixed 111 poles, 8.23.33
11J Lili'' City 4゛1λ, [Sail 29.38 Kas supply L1, ++, z) +: Stomach (7 gas injected 1.12.2
0. , l
Strut, 27 Hane, (3471i, 1 river coil Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] (1) A custom plus 7 X-ray generator, in which the waste storage chamber and the vacuum chamber are connected, and the waste injection valve has a movable electrode that seals the valve, and a movable electrode that faces the movable electrode.
It consists of a fixed electrode provided with a semiconductive dielectric on its opposing surface, and means for applying a voltage between the movable tU pole and the fixed electrode, and the voltage applying means applies a voltage between the fixed electrode and the movable electrode. This plasma ray firing device is characterized by having a configuration in which the gas is applied to the IJJ moving electrode and the constant electrode, the gas injection valve is opened, and the dregs are injected into the vacuum chamber. (21l" conductive 11IHj electric body is iJ ', l1JJ
By arranging a fixed electrode with a fixed horn facing the electrode and a stage for applying a voltage between the fixed electrode and the movable electrode, and applying a voltage of 111 by using the voltage applying means.
2. The plasma ray generator according to claim 1, wherein the gas injection valve is completely sealed each time the movable electrode is attracted to the fixed electrode. (Keep the 31iJ moving electrode through the high '+shi, arrange an O-ring in the opening, and keep the above high/) Drive? h pole to O
No. 1z i'F characterized in that the waste injection valve is stopped by crimping the ring.Claim 1
Plasma ray generator described in section. (4) The movable electrode is formed as one body, and the iiJ
lil+? Ii4.: By sucking ゛J' with the 1hθ pipe arranged around the gas injection chamber, the corresponding valve month 11. 11.1. sign and ′J“
Blasma X as described in Claim 11CI
Line generator imi+.