JPS62126533A - High speed valve - Google Patents

Abstract

PURPOSE:To make discharge regulation performable with a coil current alone, by installing a pair of air-core coils opposed to each other and also a pair of discs to be operated in producing an eddy current with current-energization to the coil, and constituting them to operate each disc independently. CONSTITUTION:Both first and second air-core coils 12 and 13 are housed in a housing 17 after interconnecting their air-core holes through and setting up a shield 16 between them. And, at the outside of these coils 12 and 13, there are provided with a pair of discs 21 and 22 for pressing both springs 23 and 24 and blocking up these air-core holes. In addition, these elements altogether are housed in an anode electrode 11 having a gas inflow port 11a and a discharge opening 11b, forming a high speed valve to be built in a plasma X-ray source or the like. And, these coils 12 and 13 are excited by drive circuits 25 and 26 via a delay circuit 27, operating these discs 21 and 22, thus plasma material gas is discharged. Therefore, regulation is made performable with a coil current alone, making it performable at a short time.

Description

[Detailed Description of the Invention] [Summary] A high-speed valve that opens and closes a flow path for fluid, particularly gas, at high speed, comprising a pair of metal plates that open and close the flow path by the counteraction of an eddy current and a magnetic field. By configuring the metal plates to operate independently, the amount of fluid discharged can be adjusted more easily and finely than before.

[Industrial application field]

The present invention relates to improvements in valves operating at high speeds.

Gas injection type plasma X-ray sources have an X-ray generation efficiency that is more than 10 times that of electron impact type XVA sources. It has come to attract attention as a radiation source.

Such a gas injection type plasma X-ray source includes a high-speed valve that injects a plasma material gas between an anode electrode and a cathode electrode, forming a plasma gas column.

[Conventional technology]

FIG. 4 is a side sectional view schematically showing a conventional high-speed valve that utilizes the repulsion of eddy currents and magnetic fields.

In FIG. 4, a high-speed valve incorporated into a plasma X-ray source includes a cylindrical anode electrode 1 having a gas inlet 1a and a gas outlet 1b, an air-core coil 2 housed in a housing 3, and an anode electrode 1. An O-ring 4 that closes the gap with the housing 3, an O-ring 5 inserted into the upper surface of the housing 3, a disc 6 that is supported so as to be able to move up and down, and presses the disc 6 against the O-ring 5 with appropriate pressure. The coil spring 7 is suitably supported for this purpose, and a high voltage power source 8 is connected to the coil 3 via a resistor R, a switch S, a capacitor C, and the like.

The high-speed valve configured in this manner connects the gas inlet 1a to a gas (plasma material gas) supply source, evacuates the inside of the anode electrode 1, and then opens the cock of the gas supply source.
The inside of the anode electrode 1 with the gas discharge port 1b blocked is filled with plasma material gas.

Therefore, the capacitor C is charged using the high voltage power supply 8,
When the open switch S is closed to release the charge in the capacitor C, a pulse current flows through the coil 2 and the disk 6
Lines of magnetic field are generated that cross the .

As a result, an eddy current is generated within the disk 6, and a repulsive action is generated in the coil 2 that pushes the disk 6 upward, causing the disk 6 to move upward.
is pushed up, and plasma material gas is discharged from the gas discharge port 1b.

Next, when the discharge of the charged charge is finished and the switch S is opened,
The eddy current and repulsion disappear, the disk 6 is pushed down by the coil spring 7 and comes into contact with the O-ring 5, and the discharge of the plasma material gas is stopped.

In a gas injection type plasma X-ray exposure apparatus incorporating such a high-speed valve, a cylindrical cathode electrode having an X-ray transmission window facing the gas discharge port 2b is attached to the anode electrode 1 via an electrical insulator. A power source is connected to the cathode electrode and the anode electrode 1 via a capacitor, a switch, etc. that causes discharge between the electrodes. The XwA transmission window made of beryllium or the like partitions the cathode electrode and the vacuum sample chamber.

Therefore, after the cathode electrode, the anode electrode 1, and the vacuum sample chamber are brought to a predetermined degree of vacuum, plasma material gas is injected into the cathode electrode via a high-speed valve to form a plasma material gas column, and at the same time, the power supply section When the switch is closed, the charge in the capacitor is discharged into the gas column,
X-rays generated by the pinch plasma are emitted from the XvA transmission window into the vacuum sample chamber.

In such a plasma X-ray source, the plasma gas column depends on the plasma material gas discharged from the high speed valve and is therefore controlled by adjusting the high speed valve.

[Problem that the invention seeks to solve]

As explained above, the conventional high-speed valve that utilizes the repulsion of eddy current and magnetic field relies on the discharge current flowing through the air-core coil 2 and the pressing blade of the coil spring 7 that presses the disk 6. The control required adjusting one or both of the discharge current and the coil spring 7.

Therefore, although this adjustment is easy when only the discharge current is required, the adjustment of 81 (intersection tA) of the coil spring 7 is very troublesome, and if the coil spring 7 is made weaker than a predetermined value, chattering will occur. was there.

[Means for solving problems]

The present invention, which aims to eliminate the above-mentioned problems, provides a first air-core coil (12) having a first air-core hole, and a second air-core coil (12) having a second air-core coil (12) communicating with the first air-core hole. air core coil (
13), and a shield body (16, 33, 34), a first metal plate (21) that faces the first air-core coil (12) and closes the first air-core hole with an appropriate pressing force, and a second air-core coil with an appropriate pressing force. (13), a second metal plate (22) that faces the second air core hole and closes the second air core hole; a first drive circuit (25) that energizes the first air core coil; Second drive circuit (26) energized
This is a high-speed valve characterized by comprising the following.

[Effect]

According to the above means, a pair of metal plates operated by eddy current and magnetic force are provided to close the fluid flow path, and the pair of metal plates are configured to operate independently. The fluid discharge rate is adjusted by controlling the pulse current flowing through each coil to operate each metal plate, eliminating the need to adjust (replace) the coil spring for pressing the metal plate, which was required in conventional discharge rate adjustment. At the same time, the fluid ejection time can now be set shorter than before.

〔Example〕

DESCRIPTION OF THE PREFERRED EMBODIMENTS A high-speed valve according to an embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a side sectional view schematically showing a valve according to a first embodiment of the present invention, FIG. 2 is a side sectional view schematically showing a valve according to a second embodiment of the present invention, and FIG. It is a time chart showing an example of the operation of the high-speed valve according to the present invention.

In FIG. 1, 11 is a cylindrical anode electrode equipped with a gas inlet 11a and a gas outlet 11b, 12 and 13 are air-core coils, 14 is an annular insulator that covers the lower and outer surfaces of the coil 12, and 15 is a coil. An annular insulator 16 covers the upper and outer surfaces of 13, and 16 accommodates insulators 14 and 15 and connects coils 12 and 1.
3, an annular shield body that covers the facing surface and both outer surfaces; 17, an annular housing made of an insulating material for mounting the shield body 16 in the anode electrode 11; 18, an anode electrode 11;
19 is an O-ring inserted into the upper surface of the housing 17, 20 is an O-ring inserted into the lower surface of the housing 17, 21 and 22 are disks made of magnetic material, 23 24 is a coil spring that presses the disk 21 against the O-ring 19 with an appropriate pressure, and 24 is a coil spring that presses the disk 21 with an appropriate pressure.
1 is a coil spring that presses O ring 19.

Furthermore, 25 is a high voltage power supply connected to the coil 12 via a resistor R+, a switch SI, a capacitor C1, etc.;
26 is resistor R1, switch S2 and capacitor C2
A high voltage power supply is connected to the coil 12 via the coil 12, etc., and 27 is a delay circuit that interlocks a pair of switches S and 82.

The high-speed valve configured in this way has a gas inlet 11a.
is connected to a gas (plasma material gas) supply source, the inside of the anode electrode 11 is evacuated, and then the cock of the gas supply source is opened, the disk 21 presses against the O-ring 19 and the disk 22 presses against the O-ring 20. The inside of the anode electrode 11 whose gas discharge port 11b is closed is filled with plasma material gas.

Therefore, the high voltage power supplies 25 and 26 are used to charge the capacitors C2 and C2, and the delay circuit 2 with the preset delay time
The open switches S and 32 are closed via the capacitors 7 and 32 to release the charges in the capacitors CI and Ct. Then, coil 1
The pulse current flowing through the coil spring 2 generates lines of magnetic force that cross the disk 21, generates eddy currents within the disk 21, and pushes the disk 21 up against the pressing force of the coil spring 23. The pulse current flowing through the coil 13 generates magnetic lines of force that cross the disk 22, and eddy currents are generated within the disk 22.
The disk 22 is pushed down against the pressing force of the coil spring 24.

As a result, the passage for the plasma material gas is opened and the plasma material gas is discharged from the gas discharge port 11b, but the opening and closing operations of the switches S and 32 are controlled simultaneously or one of them by a delay circuit 27 with a delay time set in advance. can be delayed more than the other.

Next, when the discharge of the charged charge is finished and the switches S and S2 are opened, the eddy current and magnetic repulsion disappear, and the disks 21 and 22 are pushed by the coil spring 23 or 24 and come into contact with the O-ring 19, 20. , the discharge of plasma material gas is stopped.

In FIG. 2, in which the same reference numerals are used for parts common to those in FIG. An insulator 33 is an annular shield covering the outside of the insulator 31 , 34 is an annular shield covering the outside of the insulator 32 , and the anode electrode 11 includes the insulator 31 .
An annular housing 17 is installed which accommodates a pair of coils 12 and 13 facing away from each other with shield bodies 33 and 34 in between.
A disc 21 pressed by a coil spring 23 is in contact with the housing 17, and a disc 22 pressed by a coil spring 24 is in contact with an O-ring 20 inserted into the lower surface of the housing 17.

The high-speed valve shown in FIG. 2 is incorporated into a gas injection type plasma X-ray source, and when the discharge power source 25, 26 and its control circuit 27, etc. shown in FIG. .34 surrounds the coils 12 and 13 on three sides, the leakage magnetic flux from the coil 12.13 is smaller than that of the high-speed valve shown in Fig. 1.
Excellent magnetic efficiency.

FIG. 3 shows the operating characteristics of the coils 12 and 13 that discharge the plasma material gas from time L2 to t, and even if the coil 13 is energized (switch SI is closed) at t earlier than t2,
The current supply is stopped (switch S1 is opened). On the other hand, in the delay circuit 27, the switch S2, which operates with a delay longer than the switch S, energizes the coil 12 at t2 (switch S2 is closed) and stops the energization at L4, which is later than t3 (switch S2 is closed).
separation).

〔Effect of the invention〕

As explained above, the present invention includes a pair of discs that operate in response to the repulsion of the coils when electricity is applied to opposing air-core coils to generate eddy currents, and the pair of discs operate independently. In addition, since it is configured to be able to operate in conjunction with an appropriate delay time, it is possible to control the fluid discharge pulse without disassembling the high-speed valve, making it extremely easy to control, and also making it possible to discharge fluid in a shorter time than before. Ta.

As a result, for example, when the high-speed valve of the present invention is used in a gas injection type plasma X-ray source, the generated X-rays can be easily controlled and stabilized.

[Brief explanation of drawings]

FIG. 1 is a side sectional view schematically showing a valve according to a first embodiment of the present invention, FIG. 2 is a side sectional view schematically showing a valve according to a second embodiment of the present invention, and FIG. FIG. 4 is a time chart showing an example of the operation of the high-speed valve according to the present invention. FIG. 4 is a side sectional view schematically showing a conventional high-speed valve that utilizes the anti-ta action of an eddy current and a magnetic field. In the figure, 12 is the first air-core coil, 13 is the second air-core coil, 16, 33, 34 is the shield body, 21 is the first metal plate, 22 is the second metal plate, 25 is the first air-core coil. A drive circuit, 26 is a second drive circuit, 27 is a delay circuit, and 20

Claims (1)

[Claims] A first air-core coil (12) having a first air-core hole; a second air-core coil (13) having a second air-core hole communicating with the first air-core hole; A shield body (16, 33, 34) made of a magnetic material that magnetically blocks the magnetic field formed by the first air-core coil (12) and the magnetic field formed by the second air-core coil (13), and a first metal plate (21) that faces the first air-core coil (12) with a pressing force and closes the first air-core hole; and a first metal plate (21) that faces the second air-core coil (13) with an appropriate pressing force. and a second metal plate (22) that closes the second air core hole, a first drive circuit (25) that energizes the first air core coil, and a second drive circuit that energizes the second air core coil. Drive circuit (26)
A high-speed valve characterized by comprising: