JPH0373982B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to an X-ray generation method and an X-ray generation device.

(b) Background of the technology In photolithography technology for obtaining fine patterns when manufacturing semiconductor devices such as ICs and LSIs, instead of exposing photoresist films using conventional ultraviolet rays, X-rays with shorter wavelengths are used. Increasingly, the method of exposure using

Various plasma X-ray sources are being developed as an X-ray source necessary for such an X-ray transfer device using X-rays.

(c) Prior Art and Problems Conventionally, methods for generating X-rays in such an X-ray source include a plasma focus type and a gas jet type.

In the former method, a cylindrical first electrode made of stainless steel or the like is placed in an evacuated X-ray generation chamber, and a cylindrical electrode having the same central axis as the first electrode and hollowed out is placed around the first electrode. The second part is made of stainless steel, etc.
A plasma generating gas such as krypton (Kr) is introduced into the X-ray generating chamber.
Then, a high voltage is applied between the first and second electrodes to generate a discharge, and the gas introduced by the discharge is turned into a plasma and the generated X-rays are irradiated to the outside from the X-ray generation chamber. It is something.

The method described below uses a valve to introduce a plasma-generating gas such as Kr gas into an evacuated X-ray chamber at high speed, and generates a discharge with an electrode installed in the gas passage. It is designed to generate plasma in gas.

However, the former method has the drawback that it is insufficient to efficiently contract the generated plasma, resulting in low X-ray generation efficiency, and the latter method has the disadvantage that the plasma generation gas is used to generate X-rays. It is necessary to use a mechanical valve to introduce the X-ray into the chamber at high speed, which has the disadvantage of reducing the reliability of the X-ray generator.

(d) Purpose of the Invention The present invention eliminates the above-mentioned drawbacks, provides two separate functions of plasma generation and plasma contraction within one X-ray generator, improves the X-ray generation efficiency, and improves the mechanical The object of the present invention is to provide a highly reliable X-ray generation method and an X-ray generation device that do not require a standard valve.

(e) Structure of the Invention The X-ray generation method of the present invention for achieving the above object includes: an X-ray generation chamber that can be evacuated to a vacuum; a columnar first electrode provided in the X-ray generation chamber; The X
a second electrode provided within the X-ray generation chamber, insulated from the first electrode, and arranged to form a hollow region around the first electrode; a third electrode insulated from the first and second electrodes, provided at a position separated from the first and second electrodes, and having an opening at least at a position through which the central axis of the first electrode passes; and after introducing the plasma generation gas into the X-ray generation chamber, the first
The X-ray generator is characterized in that a voltage is applied between the electrode and the second electrode, and then a voltage is applied between the second electrode and the third electrode, and the X-ray generator includes an
a ray generation chamber; a columnar first electrode provided within the X-ray generation chamber; and a hollow region provided within the X-ray generation chamber, insulated from the first electrode, and surrounding the first electrode. a second electrode arranged to form a second electrode;
Provided within the X-ray generation chamber, insulated from the first and second electrodes, provided at a position separated from the first and second electrodes, and at least a position through which the central axis of the first electrode passes. a third electrode provided with an opening; a first voltage applying means for applying a voltage between the first electrode and the second electrode; and a voltage applying means for applying a voltage between the second electrode and the third electrode. The device is characterized in that it has a second voltage applying means for applying.

(f) Embodiment of the Invention An embodiment of the present invention will be described in detail below with reference to the drawings. The figure is a cross-sectional view of an apparatus for performing the X-ray generation apparatus of the present invention. In the X-ray generation chamber 1, which is made of hollow cylindrical stainless steel, a cylindrical stainless steel is placed on an insulating substrate 2 made of ceramic or the like. A first electrode 3 is provided. A second electrode 4 made of stainless steel and having the same central axis as the first electrode and having a hollow cylindrical shape inside is provided around the first electrode 3. The first electrode 3 and the second electrode 4 are spaced apart from each other by a predetermined distance in the direction in which X-rays are irradiated, and have the same central axis as the first electrode 3 and the second electrode 4. , and a third electrode 5 made of stainless steel and having a circular shape cut out in the center is provided. Of course, this third electrode 5
A disc-shaped insulating member 6 made of ceramic is provided between the X-ray generating chamber 1 and the X-ray generating chamber 1.

After the interior of the X-ray chamber 1 is evacuated, argon (Ar) gas is introduced through the gas introduction hole 7 until the pressure in the interior reaches a pressure of about 1 Torr. A high voltage is stored in the capacitor 8 through a resistor 9, and a switch 10 is closed after introducing Ar gas.
In this way, a current is generated on the layer on the insulating substrate 2 by discharge, and this current generates a magnetic field. The plasma generated by this current and magnetic field comes to converge at one point A on the central axis 11 of the first electrode, and when the plasma converges at point A and becomes highly dense, the switch 12 is closed. Then, the plasma focused on point A due to the charge stored in the capacitor 14 by the resistor 13
It will be contracted upwards. The reason for this is that although the plasma converges at point A, as explained in the section on conventional technology and problems, the plasma focused type is insufficient to efficiently contract the generated plasma. There is also some plasma present in some parts. In this state, when the switch 12 is closed as described above and a voltage is applied between the second and third electrodes, a plasma current flows along the central axis 11, and due to the interaction with the magnetic field generated thereby. The plasma existing along the central axis 11 receives a force in the direction of the central axis 11, and this force causes the plasma to contract onto the central axis 11.

When the plasma is contracted on the central axis 11 in this way, the plasma becomes denser and has a higher temperature than in the conventional method, which facilitates the generation of X-rays and increases the efficiency of X-ray generation. .

In addition, functions are shared within the same X-ray generation chamber, such as generating and converging plasma using the first and second electrodes, and contracting the generated plasma using the first and third electrodes. Therefore, plasma generation and convergence and plasma contraction can be performed separately under optimal conditions, thereby improving X-ray generation efficiency.

In addition, since it does not use mechanical operations such as high-speed valves in conventional gas jet type X-ray generators,
This has the advantage of improving the reliability of the line generator.

(g) Effects of the invention As described above, according to the X-ray generation method and X-ray generation apparatus of the present invention, it is easy to generate high-temperature, high-density plasma.
The advantage is that a highly reliable X-ray generation method and X-ray generation device are obtained.

[Brief explanation of drawings]

The figure is a sectional view of an apparatus used for the X-ray generation method and X-ray generation apparatus of the present invention. In the figure, 1 is an X-ray generation chamber, 2 and 6 are insulating substrates, 3 is a first electrode, 4 is a second electrode, and 5 is a third electrode.
, 7 is a gas introduction hole, 8 and 14 are capacitors, 9 and 13 are resistors, 10 and 12 are switches, 1
1 indicates the central axis.

Claims (1)

[Scope of Claims] 1. An X-ray generation chamber that can be evacuated to a vacuum, a columnar first electrode provided within the X-ray generation chamber, and a columnar first electrode provided within the X-ray generation chamber. a second electrode that is insulated and arranged to form a hollow region around the first electrode; and a third electrode provided at a position separated from the second electrode and having an opening at least at a position through which the central axis of the first electrode passes, plasma generation within the X-ray generation chamber. 1. An X-ray generation method, comprising: applying a voltage between the first electrode and the second electrode, and then applying a voltage between the second electrode and the third electrode after introducing a gas for generating X-rays. 2. an X-ray generation chamber that can be evacuated; a columnar first electrode provided within the X-ray generation chamber; a second electrode arranged to form a hollow region around the electrode; and a second electrode provided within the X-ray generation chamber and insulated from the first and second electrodes, and a third electrode which is provided at a separated position and has an opening at least at a position through which the central axis of the first electrode passes; and a third electrode which applies a voltage between the first electrode and the second electrode. An X-ray generator comprising: one voltage application means; and a second voltage application means that applies a voltage between the second electrode and the third electrode.