JPS609200U - 中性粒子入射装置 - Google Patents

中性粒子入射装置

Info

Publication number
JPS609200U
JPS609200U JP9940183U JP9940183U JPS609200U JP S609200 U JPS609200 U JP S609200U JP 9940183 U JP9940183 U JP 9940183U JP 9940183 U JP9940183 U JP 9940183U JP S609200 U JPS609200 U JP S609200U
Authority
JP
Japan
Prior art keywords
neutralization cell
neutralization
cell
ion source
injection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9940183U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139440Y2 (enrdf_load_stackoverflow
Inventor
間野　三知男
後藤　貞信
近藤　修博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9940183U priority Critical patent/JPS609200U/ja
Publication of JPS609200U publication Critical patent/JPS609200U/ja
Application granted granted Critical
Publication of JPH0139440Y2 publication Critical patent/JPH0139440Y2/ja
Granted legal-status Critical Current

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JP9940183U 1983-06-29 1983-06-29 中性粒子入射装置 Granted JPS609200U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9940183U JPS609200U (ja) 1983-06-29 1983-06-29 中性粒子入射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9940183U JPS609200U (ja) 1983-06-29 1983-06-29 中性粒子入射装置

Publications (2)

Publication Number Publication Date
JPS609200U true JPS609200U (ja) 1985-01-22
JPH0139440Y2 JPH0139440Y2 (enrdf_load_stackoverflow) 1989-11-27

Family

ID=30235579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9940183U Granted JPS609200U (ja) 1983-06-29 1983-06-29 中性粒子入射装置

Country Status (1)

Country Link
JP (1) JPS609200U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0139440Y2 (enrdf_load_stackoverflow) 1989-11-27

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